Apparatus for inspecting integrated circuits
AssigneeAndo Electric Co., Ltd.
InventorNobuaki Takeuchi
Life of this patent
Estimating the term…
Abstract
The apparatus for inspecting integrated circuits according to the present invention comprises: a test signal generating device that outputs an optical test signal; an optical distributor that distributes the optical test signal into a plurality of distributed optical signals by transmitting the optical test signal through a branching optical fiber network; and a plurality of pin cards each of which generates an electric test signal by performing phase adjustment of each distributed optical signal. The pin cards are arranged so as to apply the electrical test signals to pins of an integrated circuit to be inspected.
Claims12
An apparatus for inspecting integrated circuits, comprising:
- a test signal generating device that outputs an optical test signal;
- an optical distributor that distributes the optical test signal into a plurality of distributed optical signals by transmitting the optical test signal through a branching optical fiber network, wherein the optical distributor comprises a body having a cylindrical shape, and the branching optical fiber network is fixed on the surface of the body so that output ends of the optical fiber network are arranged on an end of the body while forming a constant interval between neighboring output ends of the optical fiber network;
- and
- a plurality of pin cards each of which generates an electro test signal by performing phase adjustment of each distributed optical signal;
- wherein the pin cards are arranged so as to apply the electrical test signals to pins of an integrated circuit to be inspected.
An apparatus for inspecting integrated circuits, comprising:
- a test signal generating device that outputs an optical test signal;
- an optical distributor that distributes the optical test signal into a plurality of distributed optical signals by transmitting the optical test signal through a branching optical fiber network, wherein the optical distributor has a cylindrical shape and is formed by bending a flexible plate on which the branching optical fiber network is fixed, and the branching optical fiber network consists of a plurality of optical fibers connected to each other via branching couplers to form a tree structure;
- and
- a plurality of pin cards each of which generates an electro test signal by performing phase adjustment of each distributed optical signal;
- wherein the pin cards are arranged so as to apply the electrical test signals to pins of an integrated circuit to be inspected.
An apparatus for inspecting integrated circuits, comprising:
- a test signal generating device that outputs an optical test signal;
- an optical distributor that distributes the optical test signal into a plurality of distributed optical signals by transmitting the optical test signal through a branching optical fiber network, wherein the optical distributor comprises a body having a disk portion and a plurality of protrusions standing up from the disk portion, and the branching optical fiber network is fixed on the disk portion so that each of the output ends of the optical fiber network is fixed along each protrusion;
- and
- a plurality of pin cards each of which generates an electro test signal by performing phase adjustment of each distributed optical signal;
- wherein the pin cards are arranged so as to apply the electrical test signals to pins of an integrated circuit to be inspected.
An apparatus for inspecting integrated circuits, comprising:
- a test signal generating device that outputs an optical test signal;
- an optical distributor that distributes the optical test signal into a plurality of distributed optical signals by transmitting the optical test signal through a branching optical fiber network, wherein the optical distributor has a disk shape and is formed by:
- providing the branching optical fiber network on a disk shaped plate so that terminal optical fibers of the optical fiber network are arranged radically toward the periphery of the plate;
- cutting the plate at both sides of the terminal optical fibers to form strip portions;
- and bending the strip portions so that they stand perpendicular to the disk shaped plate;
- and
- a plurality of pin cards each of which generates an electro test signal by performing phase adjustment of each distributed optical signal;
- wherein the pin cards are arranged so as to apply the electrical test signals to pins of an integrated circuit to be inspected.
Dependencies are inferred from the claim text.