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US 6,473,520 B2Granted
Pellicle, identification system of the same, and method of identifying the same
AssigneeOki Electric Industry Co., Ltd.
InventorHiroyuki Hunatsu
Life of this patent
Estimating the term…
Abstract
A pellicle in which a portion for identifying the pellicle, which comprises a conductive film and predetermined patterns composed of conductors formed on the conductive film, is attached to a pellicle frame labeled with a pellicle membrane, is fixed onto a mask and electrically connected to signal lines formed on the mask and predetermined patterns composed of conductors. A reader supplies a source potential to the conductive film and reads electric signals sent from the predetermined patterns each comprised of the conductor through signal lines. The pellicle is identified according to each read signal.
Claims20
A pellicle comprising:
- a frame body having a first surface and a second surface opposite the first surface;
- a pellicle membrane adhered to the first surface of said frame body;
- an adhesive layer having a first surface and a second surface opposite the first surface, wherein the first surface of said adhesive layer is attached to the second surface of said frame body;
- and
- a pellicle identifying structure comprising a conductive film having a first surface attached to the second surface of said adhesive layer and a patterned conductor formed on a second surface of said conductive film which is opposite the first surface of the conductive film, wherein the patterned conductor includes a plurality of spaced apart conductive members which extend in length and width along the second surface of the conductive film and which extend in height away from the second surface of the conductive film.
2 more elements
A pellicle comprising:
- a frame body having a first surface and a second surface opposite the first surface;
- a pellicle membrane adhered to the first surface of said frame body;
- an adhesive layer having a first surface and a second surface opposite the first surface, wherein the first surface of said adhesive layer is attached to the second surface of said frame body;
- and
- a pellicle identifying structure comprising a conductive film having a first surface attached to the second surface of said adhesive layer and a patterned layer formed on a second surface of said conductive film which is opposite the first surface of said conductive film, wherein the patterned conductor includes a plurality of spaced apart conductive members which extend in length and width along the second surface of the conductive film and which extend in height away from the second surface of the conductive film, and a plurality of insulating members interposed between the conductive members.
2 more elements
A pellicle identifying system, comprising:
- a pellicle including (a) a frame body having a first surface and a second surface opposite the first surface, (b) a pellicle membrane adhered to the first surface of said frame body, (c) an adhesive layer having a first surface and a second surface opposite the first surface, wherein the first surface of said adhesive layer is attached to the second surface of said frame body, and (d) a pellicle identifying structure comprising a conductive film having a first surface attached to the second surface of said adhesive layer and a patterned conductor formed on a second surface of said conductive film which is opposite the first surface of the conductive film, wherein the patterned conductor includes a plurality of spaced apart conductive members which extend in length and width along the second surface of the conductive film and which extend in height away from the second surface of the conductive film;
- signal lines which are electrically connected to said patterned conductors, respectively;
- and
- a reader for reading signals from each of said signal lines.
1 more element
A pellicle identifying system, comprising:
- a pellicle including (a) a frame body having a first surface and a second surface opposite the first surface, (b) a pellicle membrane adhered to the first surface of said frame body, (c) an adhesive layer having a first surface and a second surface opposite the first surface, wherein the first surface of said adhesive layer is attached to the second surface of said frame body, and (d) a pellicle identifying structure comprising a conductive film having a first surface attached to the second surface of said adhesive layer and a patterned layer formed on a second surface of said conductive film which is opposite the first surface of said conductive film, wherein the patterned conductor includes a plurality of spaced apart conductive members which extend in length and width along the second surface of the conductive film and which extend in height away from the second surface of the conductive film, and a plurality of insulating members interposed between the conductive members;
- signal lines which are electrically connected to said conductors, respectively;
- and
- a reader for reading signals from each of said signal lines.
1 more element
A pellicle identifying method, comprising:
- attaching a pellicle to a mask, said pellicle including (a) a frame body having a first surface and a second surface opposite the first surface, (b) a pellicle membrane adhered to the first surface of said frame body, (c) an adhesive layer having a first surface and a second surface opposite the first surface, wherein the first surface of said adhesive layer is attached to the second surface of said frame body, and (d) a pellicle identifying structure comprising a conductive film having a first surface attached to the second surface of said adhesive layer and a patterned conductor formed on a second surface of said conductive film which is opposite the first surface of the conductive film, wherein the patterned conductor includes a plurality of spaced apart conductive members which extend in length and width along the second surface of the conductive film and which extend in height away from the second surface of the conductive film;
- connecting said patterned conductors to one ends of respective signal lines formed on said mask;
- connecting a reader to the other ends of said respective signal lines;
- and
- supplying a source potential to said conductive film;
- using said reader to read a signal from each of said signal lines connected to said patterned conductors while the source potential is supplied to said conductive film.
3 more elements
A pellicle identifying method, comprising:
- fixing onto a mask, a pellicle including (a) a frame body having a first surface and a second surface opposite the first surface, (b) a pellicle membrane adhered to the first surface of said frame body, (c) an adhesive layer having a first surface and a second surface opposite the first surface, wherein the first surface of said adhesive layer is attached to the second surface of said frame body, and (d) a pellicle identifying structure comprising a conductive film having a first surface attached to the second surface of said adhesive layer and a patterned layer formed on a second surface of said conductive film which is opposite the first surface of said conductive film, wherein the patterned conductor includes a plurality of spaced apart conductive members which extend in length and width along the second surface of the conductive film and which extend in height away from the second surface of the conductive film, and a plurality of insulating members interposed between the conductive members;
- connecting said conductors to one ends of respective signal lines formed on said mask;
- connecting a reader to the other ends of said respective signal lines;
- and
- supplying a source potential to said conductive film;
- using said reader to read a signal from each of said signal lines connected to said conductors while the source potential is supplied to said conductive film.
3 more elements
Dependencies are inferred from the claim text.