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AssigneeTomoegawa Paper Co., Ltd.
InventorsTakeshi Shima, Tadao Matsunaga, Mitsuaki Horiike, Toshiyuki Yamamoto
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The present invention provide an adhesive sheet for electrostatic chucking device having high heat resistance and to an electrostatic chucking device which causes little curvature of the ceramic board after application of heat and is excellent in heat resistance and adsorptity. The adhesive sheet of the present invention comprises a silicone resin elastic layer 11 and thermosetting adhesive layers 12 and 13 which are each laminated on the silicone resin elastic layer, wherein said thermosetting adhesive layers are composed of epoxy resin or phenol resin. The electrostatic chucking device of the present invention is produced by laminating an electrode and a ceramic layer having an adsorptive surface on a metal base in this order via the adhesive sheet of the present invention.
An adhesive sheet for electrostatic chucking device which is used for producing the electrostatic chucking device having an adsorptive surface made of ceramic, said adhesive sheet being characterized by comprising a silicone resin elastic layer and two thermosetting adhesive layers containing an epoxy resin or a phenol resin, each of which is laminated on both sides of said silicone resin elastic layer.
Dependencies are inferred from the claim text.