Catadioptric lens barrel structure having a plurality of support platforms and method of making the same
AssigneeNikon Corporation
InventorMarc Spinali
Life of this patent
Estimating the term…
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AssigneeNikon Corporation
InventorMarc Spinali
Estimating the term…
A catadioptric lens barrel structure for a projection exposure apparatus includes first and second lens barrels, each having an optical axis which runs parallel to each other. The first and second lens barrels each have an optical pivot point. The lens barrel structure includes a transverse lens barrel connecting the first and second lens barrels. A reticle is placed in front of an entrance of the first lens barrels and a wafer is placed in front of an exit of the second lens barrel. The lens barrel structure further includes a support structure for supporting the plurality of lens barrels. The support structure is made of a material having a low coefficient of thermal expansion. The support structure firmly secures the first and second lens barrels near their corresponding optical pivot points to obtain maximum optical performance. Alternatively, the support structure may firmly secure the first and second lens barrels at their base portions to provide optimum structural support.
A lens barrel structure, comprising:
A lens barrel structure, comprising:
A lens barrel structure, comprising:
A lens barrel structure, comprising:
A lens barrel structure, comprising:
A method for making a lens barrel structure, comprising:
A method of making a lens barrel structure, comprising:
Dependencies are inferred from the claim text.