Galvano-mirror and method of making the same
AssigneeFujitsu Limited
InventorsSatoshi Ueda, Ippei Sawaki, Yoshihiro Mizuno
Life of this patent
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Abstract
A method of making a galvano-mirror is provided. It includes the following steps. First, a first material substrate formed with a plurality of mirror plate regions is prepared. The mirror plate regions correspond in arrangement to the mirror plate of the galvano-mirror. Then, a second material substrate formed with a plurality of driver plate regions is prepared. The driver plate regions correspond in arrangement to the driver plate of the galvano-mirror. Then, the first and the second material substrates are attached to each other so that each of the mirror plate regions faces a relevant one of the driver plate regions. Finally, the attached first and second material substrates are divided into individual gaslvano-mirrors.
Claims16
A method of making a galvano-mirror provided with a mirror plate and at least one driver plate, the mirror plate including a pivotable member upon which reflecting means and a first electrode are provided, the driver plate including a second electrode facing the first electrode, the method comprising the steps of:
- preparing a first material substrate formed with a plurality of mirror plate regions each of which corresponds in arrangement to the mirror plate;
- preparing a second material substrate formed with a plurality of driver plate regions each of which corresponds in arrangement to the driver plate;
- attaching the first and the second material substrates so that each of the mirror plate regions faces a relevant one of the driver plate regions;
- and
- dividing the attached first and second material substrates into individual galvano-mirrors.
A galvano-mirror comprising:
- a mirror plate provided with a pivotable member upon which reflecting means and a first electrode are provided;
- and
- at least one driver plate provided with a second electrode facing the first electrode;
- wherein the mirror plate and the driver plate differ in length from each other.
A galvano-mirror comprising:
- a mirror plate provided with a pivotable member upon which reflecting means and a first electrode are provided;
- and
- a driver plate having an inner surface facing the mirror plate and an outer surface opposite to the inner surface, the inner surface being provided with a second electrode facing the first electrode, the outer surface being provided with a plurality of external connection terminals;
- wherein the driver plate is formed with a plurality of through-holes for connecting each of the first and the second electrodes to a relevant one of the external connection terminals.
Dependencies are inferred from the claim text.