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US 6,473,184 B1Granted
Interferometer which divides light beams into a plurality of beams with different optical paths
AssigneeCanon Kabushiki Kaisha
InventorsKo Ishizuka, Hidejiro Kadowaki, Yasushi Kaneda, Shigeki Kato, Takayuki Kadoshima, Sakae Horyu
Life of this patent
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Abstract
An interferometer has a semiconductor laser which oscillates in multiple modes, an optical member for providing a beam from the semiconductor laser with a substantial optical path difference between optical paths partially in one beam, and an interference optical system for causing interference, using the beam having traveled via the optical member.
Claims16
An interferometer comprising:
- a semiconductor laser which oscillates in multiple modes;
- an optical member which divides a beam from the semiconductor laser into a plurality of beams with different optical paths so as to cause an optical path difference;
- and
- an interference optical system for causing interference, using the beam having traveled via the optical member.
1 more element
A displacement measuring apparatus comprising:
- a semiconductor laser which oscillates in multiple modes;
- an optical member which divides a beam from the semiconductor laser into a plurality of beams with different optical paths so as to cause an optical path difference;
- an interference optical system for causing interference, using the beam having traveled via said optical member, said interference optical system comprising a measurement path and a reference path, said interference optical system multiplexing two beams having traveled respectively in the two paths to form an interference beam, wherein at least the measurement path runs via a surface to be measured;
- and
- a detector for receiving the interference beam, wherein displacement information of the surface to be measured is obtained from an output of said detector.
2 more elements
An information recording or/and reproducing apparatus comprising:
- a semiconductor laser which oscillates in multiple modes;
- an optical member which divides a beam from the semiconductor laser into a plurality of beams with different optical paths so as to cause an optical path difference;
- an interference optical system for causing interference, using the beam having traveled via the optical member, said interference optical system comprising a measurement path and a reference path said interference optical system multiplexing two beams having traveled respectively in the two paths to form an interference beam, wherein at least the measurement path runs via a surface displaced together with a recording or/and reproducing portion which provides for information recording or/and reproduction to an information recording medium;
- a detector for receiving the interference beam, wherein displacement information of said recording or/and reproducing portion is obtained from output of said detector;
- and
- a control system for carrying out control of relative position of said recording or/and reproducing portion to said information recording medium, based upon the displacement information.
3 more elements
A servo track writer comprising:
- a semiconductor laser which oscillates in multiple modes;
- a Fresnel zone plate for converging a beam from said semiconductor laser;
- an interference optical system for causing interference, using the beam having traveled via said Fresnel zone plate, said interference optical system comprising a measurement path and a reference path, said interference optical system multiplexing two beams having traveled respectively in the two paths to form an interference beam, wherein the beam traveling via the measurement path is reflected by a surface of a head arm supporting a magnetic head in a hard-disk drive unit and the beam traveling via the reference path is reflected by a reference surface;
- a detector for receiving the interference beam, wherein displacement information of the head arm is obtained from output of the detector;
- and
- a control system for carrying out control of relative position of said head arm to a hard disk, based on the displacement information, wherein a servo track signal is recorded on the hard disk by the magnetic head on the head arm under the control of relative position.
3 more elements
Dependencies are inferred from the claim text.