Particle size analyzer based on laser diffraction method
AssigneeShimadzu Corporation
InventorHaruo Shimaoka
Life of this patent
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Abstract
A particle size analyzer based on laser diffraction method is formed of an irradiation optical system for irradiating laser beam to particles, a measurement optical system for measuring a space intensity distribution by receiving light diffracted/scattered by the particles of the laser beam from the irradiation optical system, and an operation portion for obtaining a particle size distribution of the particles from the results measured by the measurement optical system. The irradiation optical system has a semiconductor laser in an output beam wavelength of 300 to 500 nm as a light source. Thus, particles having diameters of the order of sub-microns can be measured.
Claims6
A particle size analyzer based on laser diffraction method, comprising:
- an irradiation optical system for irradiating laser beam to particles, said irradiation optical system having a semiconductor laser in an output beam wavelength of about 300 to about 400 nm as a light source;
- a measurement optical system situated near the irradiation optical system for measuring a space intensity distribution by receiving light diffracted/scattered by particles of the laser beam from the irradiation optical system, said measurement optical system including a plurality of light sensors disposed in an area of a predetermined front angle in an irradiating direction of the laser beam, a converging lens for converging light diffracted/scattered by a particle group to be measured, and a ring detector disposed at a focal position of the converging lens and formed of a plurality of independent conical light receiving surfaces in a shape of a ring, half ring or ¼ ring having different radii;
- and
- an operation portion connected to the measurement optical system for obtaining a particle size distribution of the particles from results measured by the measurement optical system.
Dependencies are inferred from the claim text.