Anti-vibration system in exposure apparatus
AssigneeCanon Kabushiki Kaisha
InventorsShinji Wakui, Michio Yanagisawa, Takehiko Mayama
Life of this patent
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Abstract
A vibration suppressing system includes a structural member with respect to which vibration suppression is to be executed, an actuator, having a pair of a fixed member and a movable member, for moving the movable member relative to the fixed member, and a first vibration sensor for measuring vibration of the structural member. A displacement sensor measures a movement distance of the movable member, a second vibration sensor measures vibration of the movable member, and a controller controls the actuator on the basis of outputs from the first vibration sensor, the displacement sensor and the second vibration sensor.
Claims24
A vibration suppressing system, comprising:
- a structural member with respect to which vibration suppression is to be executed;
- an actuator, having a pair of a fixed member and a movable member, for moving the movable member relative to the fixed member;
- a first vibration sensor for measuring vibration of said structural member;
- a displacement sensor for measuring a movement distance of the movable member;
- a second vibration sensor for measuring vibration of the movable member;
- and
- a controller for controlling said actuator on the basis of outputs from said first vibration sensor, said displacement sensor and said second vibration sensor.
An exposure apparatus, comprising:
- a vibration suppressing system including (i) a structural member with respect to which vibration suppression is to be executed, (ii) an actuator, having a pair of a fixed member and a movable member, for moving the movable member relative to the fixed member, (iii) a first vibration sensor for measuring vibration of said structural member, (iv) a displacement sensor for measuring a movement distance of the movable member, (v) a second vibration sensor for measuring vibration of the movable member, and (vi) a controller for controlling said actuator on the basis of outputs from said first vibration sensor, said displacement sensor and said second vibration sensor;
- and
- a stage for positioning a wafer.
A vibration suppressing system, comprising:
- a structural member with respect to which vibration suppression is to be executed;
- an actuator having a pair of a fixed portion and a movable portion, said movable portion being movable relative to said fixed portion;
- a vibration sensor, mounted on at least one of said fixed portion and said movable portion, said vibration sensor including a variable resistance type acceleration sensor, a differential amplifier circuit to which a signal from said variable resistance type acceleration sensor is to be applied, and a band-pass filter having a combination of a low-pass filter and a negative feedback based on an integration circuit;
- and
- a controller for controlling said actuator on the basis of an output of said vibration sensor.
Dependencies are inferred from the claim text.