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US 6,472,840 B1Granted
Vibration cancellation apparatus and exposure apparatus
AssigneeNikon Corporation
InventorMasato Takahashi
Life of this patent
Estimating the term…
Abstract
When a drive unit which drives a reticle stage accelerates or decelerates it, the reaction experienced by this drive unit is discharged to a floor FD via an actuator, an attached member, and a reaction frame. Vibration generated in the reaction frame at this time is detected by an acceleration sensor. A vibration cancellation control section determines a direction and thrust for driving a movable section to which a weight is fixed in order to quell vibration of the reaction frame detected by the acceleration sensor, and emits a control signal to a driver.
Claims25
A vibration cancellation apparatus comprising:
- a base member;
- a movable element which is set up upon said base member, and is movable upon said base member;
- a vibration proof unit that supports said base member above a foundation;
- a reaction transmission member which discharges reaction generated when said movable element moves upon said base member by transmitting the reaction to the foundation, the reaction transmission member being isolated from said base member by said vibration proof unit;
- a vibration detection device which detects vibration generated in said reaction transmission member;
- a weight which is movable in a direction to reduce the vibration, and which is provided to said reaction transmission member;
- and
- a vibration cancellation drive device which drives said weight so as to reduce the vibration based upon the vibration detected by said vibration detection device.
5 more elements
vibration cancellation apparatus comprising:
- a vibration detection device which is provided to a vibration cancellation object, and which outputs a vibration signal according to the magnitude of vibration generated in said vibration cancellation object;
- a weight which is provided so as to be capable of relative movement with respect to said vibration cancellation object;
- a drive device which generates relative movement between said weight and said vibration cancellation object;
- and
- a position determination device which determines the position of said weight and outputs a position signal according to the position of said weight;
- wherein
- said drive device performs control based upon a first control loop which controls the drive speed of said weight based upon said vibration signal, and a second control loop which moves said weight to a specified position based upon the position information.
4 more elements
A vibration cancellation apparatus comprising:
- a first vibration detection device which is provided to a vibration cancellation object, and which outputs a first vibration signal according to the magnitude of vibration generated in said vibration cancellation object;
- a weight which is provided so as to be capable of relative movement with respect to said vibration cancellation object;
- a second vibration detection device which is provided to said weight, and which outputs a second vibration signal according to the magnitude of vibration generated in said weight;
- and
- a drive device which generates drive force which causes relative movement between said weight and said vibration cancellation object;
- wherein
- said drive device performs control based upon said first vibration signal and said second vibration signal.
4 more elements
A vibration cancellation apparatus for reducing vibration generated in a vibration cancellation object comprising:
- a vibration detection device which outputs a vibration signal according to the magnitude of vibration generated in said vibration cancellation object;
- a drive device which generates a drive force to reduce the vibration based upon said vibration signal;
- a support member which supports said vibration detection device and said drive device;
- and
- a fixing device which fixes said support member to said vibration cancellation object in a removable manner;
- and
- a weight which is provided so as to be capable of relative movement with respect to said vibration cancellation object, the mass of said weight being adjustable.
4 more elements
A vibration cancellation apparatus for reducing vibration generated in a vibration cancellation object comprising:
- a vibration detection device which outputs a vibration signal according to the magnitude of vibration generated in said vibration cancellation object;
- a drive device which generates a drive force to reduce the vibration based upon said vibration signal;
- a support member which supports said vibration detection device and said drive device;
- a fixing device which fixes said support member to said vibration cancellation object in a removal manner;
- a weight which is provided so as to be capable of relative movement with respect to said vibration cancellation object;
- and
- a position detection device which detects the position of said weight and outputs a position signal according to the position of said weight,
- wherein said drive device performs control based upon a first control loop which controls the drive speed of said weight based upon said vibration signal, and a second control loop which moves said weight to a predetermined position based upon the position information.
5 more elements
Dependencies are inferred from the claim text.