Electron-emitting device provided with pores that have carbon deposited therein
AssigneeCanon Kabushiki Kaisha
InventorsMasato Yamanobe, Takeo Tsukamoto, Shinichi Kawate
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Abstract
An electron-emitting device disclosed has stable electron emission characteristics with little variation, in high electron emission efficiency, in high definition, and at low driving voltage. The electron-emitting device disclosed is constructed in such structure that on a substrate there are a lower electrode, an insulating layer having pores, and an upper electrode stacked in this order, the insulating layer is an anodic oxide layer, and a carbon deposit is formed in the pores.
Claims34
An electron-emitting device comprising:
- a lower electrode;
- an insulating layer having a pore disposed on the lower electrode;
- an upper electrode disposed on the insulating layer;
- a first carbon deposit in contact with, and connected electrically to, said upper electrode and disposed in said pore;
- and
- a second carbon deposit in contact with, and connected electrically to, said lower electrode, said second carbon deposit being electrically conductive and disposed in said pore;
- wherein a gap is formed between said first carbon deposit and said second carbon deposit.
An electron-emitting device comprising a lower electrode, an insulating layer having a pore, and an upper electrode stacked in this order on a substrate,
- wherein a carbon deposit is provided in said pore, and a small gap is provided between said upper electrode and said carbon deposit and, wherein said carbon deposit is electrically conductive, is electrically connected to said upper electrode, and covers at least an inner side surface of said pore,
- wherein a gap is provided between the carbon deposit on said lower electrode and the carbon deposit connected to said upper electrode.
An electron-emitting device comprising a lower electrode, an insulating layer having a pore, and an upper electrode stacked in this order on a substrate,
- wherein an electron-emitting region is provided in said pore, said electron-emitting region being comprised of a small gap between said lower electrode and upper electrode, said small gap being formed by an electroconductive body of a rim shape formed along an inner wall of said pore, and the upper electrode.
An electron-emitting device comprising a lower electrode, an insulating layer having a pore, and an upper electrode stacked in this order on a substrate,
- wherein an electron-emitting body is provided in said pore, and wherein the following condition is satisfied:
- 0.5×L≦t<2λ
- where t is a thickness of said upper electrode, L is a length of said pore, and λ is a mean free path of electron transmission of said upper electrode.
Dependencies are inferred from the claim text.