US 6,472,810 B1 · Light source device, exposure apparatus and cathode ray tube panel

Abstract

A light device includes a shielding plate (2) having an opening (2H) of a rectangular cross-sectional configuration and placed over an optical window retainer (15). The shielding plate (2) is placed so that an opening wall surface (2HS) thereof is positioned on an optical path (Zr(x)) of light emerging from an optical window (14) at a usable angle (θe) and that a half width (Xu) of the opening (2H) satisfies Xu=u/cot(θe)+t×sin(θe)/sgrt(ng2−sin2(θe))+s. The optical window retainer (15) is placed in a region outside a boundary line given as Zh(x)=±(1×tan(θe)(x±Xu)+u (plus (+) when x≦−Xu; minus (−) when x≧Xu) and also in aregion outside the optical path (Zr(x)). The light source device suppresses an uneven illuminance distribution of exposure light resulting from superimposition of light scattered from the opening wall surface of the optical window retainer upon the exposure light.

Claims14

Dependent claims

A light source device incorporated in an exposure apparatus for use in manufacturing cathode ray tube panel, said light source device comprising:

a light source;
a light source housing configured to hold said light source therein;
an optical window configured to cause light from said light source to emerge into the atmosphere;
an optical window retainer configured to fix said optical window to said light source housing;
and
a shielding plate placed over said optical window and said optical window retainer and having an opening wall surface extending inwardly beyond an opening wall surface of said optical window retainer to a position overlying said optical window,
wherein an upper surface edge portion of said opening wall surface of said shielding plate is positioned in a region including and outside an optical path of outgoing light emerging from said optical window into said atmosphere at a predetermined angle, and
wherein said optical window retainer is positioned in a region including and outside a boundary line passing through a position of a lower surface edge portion of said opening wall surface of said shielding plate and having a line-symmetrical relation to said optical path of said outgoing light.

5 more elements

Dependencies are inferred from the claim text.

Light source device, exposure apparatus and cathode ray tube panel

Life of this patent

Light source device, exposure apparatus and cathode ray tube panel

Life of this patent

Abstract

Claims14