Microprocessor structure having a compound semiconductor layer
AssigneeMotorola, Inc.
InventorsPeter J. Wilson, Mihir A. Pandya
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AssigneeMotorola, Inc.
InventorsPeter J. Wilson, Mihir A. Pandya
Estimating the term…
High quality epitaxial layers of monocrystalline materials can be grown overlying monocrystalline substrates such as large silicon wafers by forming a compliant substrate for growing the monocrystalline layers. An accommodating buffer layer comprises a layer of monocrystalline oxide spaced apart from a silicon wafer by an amorphous interface layer of silicon oxide. The amorphous interface layer dissipates strain and permits the growth of a high quality monocrystalline oxide accommodating buffer layer. The accommodating buffer layer is lattice matched to both the underlying silicon wafer and the overlying monocrystalline material layer. Any lattice mismatch between the accommodating buffer layer and the underlying silicon substrate is taken care of by the amorphous interface layer. Mixed technology structures are provided in which a microprocessor is formed entirely in a monocrystalline compound semiconductor material layer overlying the silicon substrate. A microprocessor is also provided utilizing portions of the silicon substrate and the monocrystalline compound semiconductor material layer.
A semiconductor structure comprising:
A semiconductor structure comprising:
A semiconductor structure comprising:
A semiconductor device comprising:
A process for fabricating a semiconductor structure comprising:
A semiconductor structure comprising:
Dependencies are inferred from the claim text.