Fabrication of metallic microstructures by micromolding nanoparticles
AssigneeSandia Corporation
InventorsAlfredo M. Morales, Michael R. Winter, Linda A. Domeier, Shawn M. Allan, Dawn M. Skala
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Abstract
A method is provided for fabricating metallic microstructures, i.e., microcomponents of micron or submicron dimensions. A molding composition is prepared containing an optional binder and nanometer size (1 to 1000 nm in diameter) metallic particles. A mold, such as a lithographically patterned mold, preferably a LIGA or a negative photoresist mold, is filled with the molding composition and compressed. The resulting microstructures are then removed from the mold and the resulting metallic microstructures so provided are then sintered.
Claims44
A method for preparing a metallic microstructure, comprising:
- (a) providing, as a mold, a substrate having a pattern on its surface, said pattern comprised of elevated segments and corresponding voids therebetween;
- (b) applying a molding composition to the substrate surface and pressing the composition into the voids of the surface pattern to provide a green microstructure in said voids, said molding composition comprising metallic nanoparticles and an optional binder;
- (c) removing the green microstructure from the voids;
- and
- (d) sintering the green microstructure.
A method for preparing a metallic microstructure, comprising:
- (a) providing a lithographically patterned mold comprising a substrate having a pattern on its surface, said pattern comprised of elevated segments and corresponding voids therebetween, said voids having a diameter of less than about 100 microns in diameter;
- (b) applying a molding composition to the substrate surface and pressing the composition into the voids of the surface pattern, said molding composition comprising a paste of:
- (i) metallic nanoparticles having a diameter in the range of approximately 1 nm to 1000 nm;
- (ii) an optional binder;
- and
- (iii) a fluxing agent comprised of a member of the group consisting of acids, strong bases and mixtures of an anhydride and a member of the group consisting of water, alcohols and polyols;
- and
- (c) repeating step (b) with increasing pressure to form a green microstructure;
- (d) removing the green microstructure from the voids;
- and
- (e) sintering the green microstructure to form a metallic microstructure.
Dependencies are inferred from the claim text.