Dielectrically separated wafer and method of manufacturing the same

A fabrication method for a dielectrically separated wafer, the method comprising:

• preparing a monocrystalline silicon wafer including an impurity of one conductivity type at a low concentration;
• forming a high concentration impurity layer including at high concentration an impurity of identical conductivity at a specified depth on the monocrystalline silicon wafer;
• forming dielectrically separating grooves by anisotropic etching on the silicon wafer surface;
• coating a dielectrically separating insulating film on the surface of a silicon wafer including the dielectrically separating grooves;
• depositing a polysilicon layer by forming first a seed low temperature CVD polysilicon layer by a lower temperature CVD process and by forming second a high temperature CVD polysilicon layer by a high temperature CVD method on the dielectrically separating insulating film, and providing a plurality of dielectrically separated silicon islands insulated by a dielectrically separating insulating film by separation polishing the silicon surface of the side of the silicon wafer opposite to the side on which the polysilicon layer is deposited;
• and
• wherein depending on the corrosion resistance of the deposited polysilicon layer, the thickness of the dielectrically separating insulating film, the etching depth for forming the dielectrically separating grooves, and the distance between neighboring dielectrically separated silicon islands, the surface between one dielectrically separated silicon island and a neighboring dielectrically separated silicon island is flattened by changing the conditions of the separation polishing of the silicon surface.