Electrostatic discharge protection for integrated circuit sensor passivation
AssigneeSTMicroelectronics S.r.l.
InventorsDanielle A. Thomas, Frank Randolph Bryant
Life of this patent
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Abstract
A structure and method for creating an integrated circuit passivation (24) comprising, a circuit (16), a dielectric (18), and metal plates (20) over which an insulating layer (26) is disposed that electrically and hermetically isolates the circuit (16), and a discharge layer (32) that is deposited to form a passivation (24) that protects the circuit (16) from electrostatic discharges caused by, e.g., a finger, is disclosed.
Claims10
A method of fabricating a fingerprint sensor passivation comprising the steps of:
- assembling a sensor circuitry;
- depositing an insulating layer on the sensor circuitry;
- and
- depositing a discharge layer over the insulating layer, wherein the discharge layer diffuses electrostatic charges that are formed when the sensor is contacted.
A method of fabricating a fingerprint sensor comprising the steps of:
- assembling a sensor circuitry;
- depositing an insulating layer on the sensor circuitry;
- depositing a conductive discharge layer over the insulating layer;
- and
- connecting the conductive discharge layer to electronic components to diffuse electrostatic charges to the electronic components.
A method of fabricating an integrated circuit comprising:
- forming sensor input components;
- depositing an insulating layer on the sensor input components;
- and
- depositing a conductive layer over the insulating layer to diffuse electrostatic charges that are formed when the integrated circuit is contacted.
A method of protecting a fingerprint sensor from electrostatic charges comprising:
- forming a fingerprint sensor circuitry;
- depositing an insulating layer on the fingerprint sensor circuitry;
- and
- depositing a conductive layer over the insulating layer to diffuse electrostatic charges that are formed when the integrated circuit is contacted by a finger.
Dependencies are inferred from the claim text.