Thin copper film directly bonded polyimide film and method of manufacturing the same
AssigneePresident of Shizuoka University
InventorsNorihiro Inagaki, Shigeru Tasaka
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Abstract
Provided is a thin copper film directly bonded polyimide film in which a thin copper film is directly and strongly connected to a polyimide film. This thin copper film directly bonded polyimide film includes a polyimide film modified by bonding an organic silane compound having a cyano group represented by formula —Si(R—CN)n (wherein R represents alkyl group having 1 to 6 carbon atoms and n represents a positive number from 1 to 3) to a carbon atom on the surface of the polyimide film, and a thin copper film directly bonded to the modified surface of the polyimide film.
Claims11
A copper film directly bonded polyimide film comprising a polyimide film modified by bonding an organic silane compound having a cyano group represented by the formula —Si(R—CN)nwherein R represents an alkyl group having 1 to 6 carbon atoms and n represents a positive integer from 1 to 3 to a carbon atom on a surface of said polyimide film, and a copper film directly bonded to the modified surface of said polyimide film.
Dependencies are inferred from the claim text.