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US 6,472,030 B1Granted
Preparation of laser deposited oriented films and membranes
AssigneeBoard of Regents, The University of Texas System
InventorsKenneth J. Balkus, Jr., Mary E. Kinsel, Lisa L. Washmon
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Abstract
A method of forming an oriented film. A target is provided and material from the target is ablated onto a substrate to form a film. The film is heated in a synthesis gel of the target material to orient the film.
Claims9
A method of forming a perpendicularly-oriented non UTD-1 film on a substrate, comprising:
- providing a target comprising a zeolite other than UTD-1;
- ablating material from the target onto the substrate to form a non UTD-1 film;
- heating the non UTD-1 film in a synthesis gel of the target;
- and
- orientating the non UTD-1 film, with the heating, so that its pore structure is substantially perpendicular to the substrate, thereby forming the perpendicularly-oriented non UTD-1 film on the substrate.
2 more elements
A method of forming a perpendicularly-oriented non UTD-1 film on a substrate, comprising:
- providing a target comprising a zeolite other than UTD-1, the target further comprising CP*2Co+ or Cp2Fe;
- directing pulsed laser radiation having an energy between about 70 mJ/pulse and about 200 mJ/pulse at a repetition rate of between about 1 Hz and about 50 Hz to the target to create a plume;
- heating the substrate;
- maintaining a pressure between about 150 mTorr and about 350 mTorr about the substrate;
- placing the substrate in operative relation to the plume to deposit target material onto the substrate to form a non UTD-1 film;
- heating the non UTD-1 film in a synthesis gel of the target;
- and
- orientating the non UTD-1 film, with the heating, so that its pore structure is substantially perpendicular to the substrate, thereby forming the perpendicularly-oriented non UTD-1 film on the substrate.
5 more elements
Dependencies are inferred from the claim text.