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US 6,472,014 B1Granted
Uniform surface texturing for PVD/CVD hardware
AssigneeNovellus Systems, Inc.
InventorStanley Matsuba
Life of this patent
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AssigneeNovellus Systems, Inc.
InventorStanley Matsuba
Estimating the term…
A method is provided for texturing the surface of a substrate to enhance the adhesion and to reduce the stress concentration of coatings applied to the substrate. In one embodiment, a first layer of first spheres is applied to the substrate to provide a textured surface onto which is deposited a second layer of larger second spheres. The layered substrate is then reflowed to melt the first layer of first spheres so that the second layer of second spheres is embedded in the formed first reflowed layer and which second layer of second spheres protrudes above the top of the reflowed layer and forms a textured surface corresponding to the shape of abutted and/overlapping second spheres. In another embodiment, the first layer of first spheres is reflowed and then a second layer of second spheres deposited thereon. The first layer is then again reflowed embedding the second spheres therein. The textured substrate may then be coated with any suitable material using any suitable process to form a coated substrate article such as a shield used in a PVD or CVD process.
A method for depositing a material on a substrate comprising the steps of:
A method for depositing a material on a substrate comprising the steps of:
A method for texturing the surface of a substrate to enhance the adhesion of a material to be deposited on the substrate comprising the steps of:
A method for texturing the surface of a substrate to enhance the adhesion of a material to be deposited on the substrate comprising the steps of:
Dependencies are inferred from the claim text.