Silicon oxide particles
AssigneeNanoGram Corporation
InventorsNobuyuki Kambe, Xiangxin Bi
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Abstract
A method for the production of silicon oxide particles includes the pyrolysis of a molecular stream with a silicon compound precursor, an oxygen source and a radiation absorbing gas. The pyrolysis is driven by a light beam such as an infrared laser beam. The method can be used in the production of nanoscale particles including highly uniform nanoscale particles.
Claims20
A method of producing SiO2 particles comprising reacting a molecular stream comprising a silicon compound precursor, an oxygen source distinct from the silicon compound precursor and a radiation absorbing gas in a reaction chamber where the reaction is driven by heat absorbed from a radiation beam.
A method of producing SiO2 particles comprising reacting a molecular stream comprising a silicon compound precursor, an oxygen source and a radiation absorbing gas in a reaction chamber, where the reaction is driven by heat absorbed from a light beam, wherein the particles have an average diameter less than about 500 nm.
Dependencies are inferred from the claim text.