Buffer layer in flat panel display
AssigneeMicron Technology, Inc.
InventorsRobert J. Hanson, Won-Joo Kim, Mike E. Pugh
Life of this patent
Estimating the term…
Abstract
In devices such as flat panel displays, an aluminum oxide layer is provided between an aluminum layer and an ITO layer when such materials would otherwise be in contact to protect the ITO from optical and electrical defects sustained, for instance, during anodic bonding and other fabrication steps. This aluminum oxide barrier layer is preferably formed either by: (1) partially or completely anodizing an aluminum layer formed over the ITO layer, or (2) an in situ process forming aluminum oxide either over the ITO layer or over an aluminum layer formed on the ITO layer. After either of these processes, an aluminum layer is then formed over the aluminum oxide layer.
Claims12
A method of fabricating a display device structure, comprising:
- forming a tin oxide layer;
- forming an aluminum oxide layer over the tin oxide layer;
- and
- forming an aluminum layer over the aluminum oxide layer after the aluminum oxide layer has been formed over the tin oxide layer, the aluminum layer directly covering a substantial portion of the aluminum oxide layer.
Dependencies are inferred from the claim text.