Electrodeposition method of forming an oxide film
AssigneeCanon Kabushiki Kaisha
InventorsKozo Arao, Noboru Toyama, Yuichi Sonoda, Yusuke Miyamoto
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Abstract
This invention provides an electrodeposition apparatus, comprising at least one electrodeposition vessel for supplying a current between a substrate and an electrode in an electrodeposition bath to form an oxide film or the substrate and a rinsing means for rinsing the substrate after passing the electrodeposition tank with water, wherein a humidifying means for preventing drying of at least the film forming surface of the substrate is provided along the transporting path of the substrate at least at the exit side of the electrodeposition vessel and an oxide film forming method. Thus a uniform oxide film without unevenness can be formed on the substrate.
Claims43
A method of forming a deposited film comprising the steps of:
- supplying a current between a substrate and an electrode in an electrodeposition bath of at least one electrodeposition vessel to form an oxide film on the substrate;
- rinsing the substrate after passing the electrodeposition vessel with water by a rinsing means;
- and
- humidifying at least a film forming surface of the substrate with a humidifying means along a transporting path of the substrate at least at an exit side of the electrodeposition vessels;
- and
- forming a semiconductor layer by CVD on the oxide film.
A method of forming a deposited film comprising the steps of:
- supplying a current between a substrate and an electrode in an electrodeposition bath of at least one electrodeposition vessel to form an oxide film on the substrate;
- rinsing the substrate after passing the electrodeposition vessel with water by a rinsing means;
- transporting the substrate after passing the electrodeposition vessel to another electrodeposition vessel or a rinsing means before a substrate surface is dried spontaneously to cause precipitation of a solute of the bath;
- and
- forming a semiconductor layer by CVD on the oxide film.
Dependencies are inferred from the claim text.