US 6,471,783 B1Granted

Production method of electronic parts and water treatment apparatus

AssigneeTDK Corporation

InventorsMasashi Gotoh, Jitsuo Kanazawa, Syuichiro Yamamoto

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Abstract

A production method of an electronic part comprising a step o working a substrate having formed thereon a metal thin-film conductor using water, wherein said water satisfies the relations 3.5≦pH≦6.5 and DO≦0.5 pH2−6.5 pH+22 [wherein DO represents a dissolved oxygen amount (unit ppm)]. By using the water in the case of working substrates in the production steps of electronic parts, the generations of the static electricity and the oxidation caused by water used for working are restrained. The present invention is particularly effective in working of an electronic part wherein a metal thin-film conductor containing at least two kinds of metals including Al on a substrate having a pyroelectric property.

Claims3

Dependent claims

A production method for rinsing an electronic part, comprising:

bubbling a carbonic acid gas through water in a mixing bath to produce carbonated water, said mixing bath having an open portion configured to discharge dissolved oxygen excluded from the water and the carbonic acid gas into the atmosphere and including a porous filter configured to promote exclusion of the dissolved oxygen, said mixing bath being enclosed in a storage tank to isolate the produced carbonated water from the atmosphere;
and
contacting a substrate having formed thereon a metal thin-fihn conductor with the carbonated water from the storage tank satisfying the following relations:
3.5<pH<6.5;
and
0.875<DO<(0.5 pH2−6.5 pH+22),
where DO represents the amount in ppm of dissolved oxygen in the water and pH is the pH level of the water.

4 more elements

Dependencies are inferred from the claim text.