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US 6,471,772 B1Granted
Laser processing apparatus and laser processing method
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorKoichiro Tanaka
Life of this patent
Estimating the term…
Abstract
A laser irradiating apparatus includes a cylindrical lens group that divides a laser beam and a cylindrical lens that re-couples a laser beam as divided. The cylindrical lens is shaped in a parallelogram whose angles are not a right angle, thereby being capable of dispersing a portion where interference is strengthened in a laser beam to restrain irradiation unevenness.
Claims22
A laser irradiating apparatus including an optical system comprising:
- a parallelogram cylindrical lens group to divide a light;
- and
- a parallelogram cylindrical lens to re-couple said light into divided beams.
A laser irradiating apparatus including an optical system comprising:
- a cylindrical lens group to divide a light;
- and
- a parallelogram cylindrical lens to re-couple the divided light.
A laser irradiating apparatus comprising:
- a parallelogram cylindrical lens formed by a locus resulting from moving a sectional shape in parallel to a direction;
- wherein said sectional shape can converge two dimensional spacial parallel light beams having a specific wavelength in one point.
A laser irradiating apparatus comprising:
- a cylindrical lens group to divide a light;
- and
- a parallelogram cylindrical lens formed by a locus resulting from moving a sectional shape in parallel to a direction;
- wherein said sectional shape can converge two dimensional spacial parallel light beams having a specific wavelength in one point;
- and
- wherein said parallelogram cylindrical lens re-couples the divided light.
3 more elements
A laser irradiating apparatus comprising:
- a parallelogram cylindrical lens group to divide a light;
- and
- a parallelogram cylindrical lens formed by a locus resulting from moving a sectional shape in parallel to a direction;
- wherein said sectional shape can converge two dimensional spacial parallel light beams having a specific wavelength in one point;
- and
- wherein said parallelogram cylindrical lens re-couples the divided light.
3 more elements
A laser irradiating apparatus comprising:
- a cylindrical lens group to divide a light beam;
- and
- a parallelogram cylindrical lens formed by a locus resulting from moving a sectional shape in parallel to a direction;
- wherein said sectional shape can converge two dimensional spacial parallel light beams having a specific wavelength in one point;
- and
- wherein said parallelogram cylindrical lens re-couples the divided light beam,
- wherein said parallelogram cylindrical lens is shaped such that a plane made by the collection of focal points formed when the parallel lights are made mutually incident from an arbitrary direction is orthogonal to a plane including said sectional shape,
- wherein said sectional shape and said direction form an angle Y, and
- wherein said angle Y is not a right angle.
6 more elements
A laser irradiating apparatus comprising:
- a parallelogram cylindrical lens group to divide a light;
- and
- a parallelogram cylindrical lens formed by a locus resulting from moving a sectional shape in parallel to a direction;
- wherein said sectional shape can converge two dimensional spacial parallel light beams having a specific wavelength in one point;
- and
- wherein said parallelogram cylindrical lens re-couples the divided light,
- wherein said parallelogram cylindrical lens is shaped such that a plane made by the collection of focal points formed when the parallel lights are made mutually incident from an arbitrary direction is orthogonal to a plane including said sectional shape,
- wherein said sectional configuration and said direction form an angle Y, and
- wherein said angle Y is not a right angle.
6 more elements
A laser irradiating apparatus comprising:
- a parallelogram cylindrical lens group including a plurality of parallelogram first cylindrical lenses, each of said parallelogram first cylindrical lenses being formed by a locus resulting from moving a sectional shape in parallel to a direction;
- and
- a parallelogram second cylindrical lens having a same characteristic as said parallelogram first cylindrical lens;
- wherein said sectional shape can converge two dimensional spacial parallel light having a specific wavelength in one point;
- wherein each of said parallelogram first and second cylindrical lenses is shaped such that a plane made by the collection of focal points formed when the parallel lights are made mutually incident from an arbitrary direction is orthogonal to a plane including said sectional shape, and
- wherein said sectional shape and said direction form an angle Y,
- wherein said angle Y is equal to each other in the respective parallelogram first and second cylindrical lenses, and
- wherein said angle Y is not a right angle.
5 more elements
A laser irradiating apparatus, comprising:
- a means for generating a laser beam;
- lenses including a parallelogram cylindrical lens group that unifies the distribution of energy of a linear laser beam in a linear direction thereof, which is a final processed configuration while enlarging said laser beams after being divided, and a parallelogram first cylindrical lens;
- a second cylindrical lens to converge said laser beams in a line;
- and
- a movable table variable in its moving direction.
2 more elements
A laser irradiating apparatus comprising:
- a means for generating a laser beam;
- lenses including a parallelogram cylindrical lens group that unifies the distribution of energy of a linear laser beam in a linear direction thereof, which is a final processed configuration while enlarging said laser beams after being divided, and a parallelogram first cylindrical lens;
- a second cylindrical lens to converge said laser beam in a line;
- and
- a movable table that moves in one direction.
2 more elements
A laser irradiating apparatus comprising:
- a means for generating a laser beam;
- lenses including a parallelogram first cylindrical lens group that unifies the distribution of energy of a linear laser beam in a linear direction thereof, which is a final processed configuration while enlarging said laser beams after being divided, and a parallelogram first cylindrical lens;
- lenses including a second cylindrical lens group to converge said laser beam in a line by re-coupling said laser beam which has been divided, and a parallelogram second cylindrical lens;
- and
- a movable table that moves in one direction.
2 more elements
A laser irradiating apparatus comprising:
- a means for generating a laser beam;
- first lenses including a parallelogram first cylindrical lens group that unifies the distribution of energy of a linear laser beam in a linear direction thereof, which is a final processed configuration while enlarging said laser beams after being divided, and a parallelogram first cylindrical lens;
- second lenses including a second cylindrical lens group that converges said laser beam in a line by re-coupling said laser beam which has been divided, and a parallelogram second cylindrical lens;
- and
- a movable table variable in its moving direction.
2 more elements
Dependencies are inferred from the claim text.