Method of and apparatus for growing ribbon of crystal
AssigneeEbara Corporation
InventorsKenji Terao, Hideyuki Isozaki, Taro Takahashi, Motohiro Niijima
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Abstract
A seed crystal is lowered toward a melt, and a contact between the seed crystal and the melt is detected using an image captured by an imaging device. The temperature of the melt is adjusted to keep a meniscus of the melt in contact with the seed crystal. The temperature of the melt is then lowered to create a wingout extending from the seed crystal. The length and symmetry of the wingout is detected with an image captured by the imaging device, and a ribbon of crystal following the wingout starts to be lifted from the melt.
Claims13
A method of growing a ribbon of crystal, comprising:
- lowering a seed crystal toward a melt;
- detecting a contact between said seed crystal and said melt with an image captured by an imaging device;
- adjusting the temperature of said melt to keep a meniscus of said melt in contact with said seed crystal;
- detecting a wingout with an image captured by said imaging device;
- and then
- starting to lift a ribbon of crystal from said melt.
A method of growing a crystal, comprising:
- lowering a seed crystal toward a melt;
- detecting a contact between said seed crystal and said melt via an image obtained by performing a template matching process;
- adjusting the temperature of said melt;
- and
- starting to lift a crystal.
A apparatus for growing a ribbon of crystal, comprising:
- a container for containing a melt in a crucible;
- a lifter/lowering device for lowering a seed crystal into the melt and lifting the seed crystal away from the melt;
- an imaging device for capturing images of the surface of the melt and a ribbon of crystal produced from the melt;
- and
- a controller for controlling conditions for growing the ribbon of crystal based on the images captured by said imaging device.
Dependencies are inferred from the claim text.