Titanium silicide nitride emitters and method
AssigneeMicron Technology, Inc.
InventorsTianhong Zhang, John K. Lee, Behnam Moradi
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Abstract
A field emission display apparatus includes a plurality of emitters formed on a substrate. Each of the emitters includes a titanium silicide nitride outer layer so that the emitters are less susceptible to degradation. A dielectric layer is formed on the substrate and the emitters, and an opening is formed in the dielectric layer surrounding each of the emitters. A conductive extraction grid is formed on the dielectric layer substantially in a plane defined by the emitters, and includes an opening surrounding each of the emitters. A cathodoluminescent faceplate having a planar surface is disposed parallel to the substrate.
Claims17
A method for preparing emitters comprising:
- forming a plurality of emitters including silicon on a surface of a substrate;
- forming a dielectric layer over the surface and the plurality of emitters, the dielectric layer having a thickness less than a height of the emitters above the surface;
- forming a conductive layer on the dielectric layer;
- polishing the conductive and dielectric layers to remove material extending beyond tips of the plurality of emitters and to expose portions of the dielectric above the tips of the plurality of emitters;
- removing a portion of the dielectric layer to expose at least the tips of the plurality of emitters;
- and
- forming a layer of titanium silicide nitride on at least a portion of each of the emitters.
A method for making a field emission display, the method comprising:
- forming a plurality of emitters on a substrate;
- forming a dielectric layer on the substrate, the dielectric layer including an opening surrounding each of the emitters;
- forming a conductive layer on the dielectric layer, the conductive layer including an opening surrounding each of the emitters;
- and
- forming titanium silicide nitride on at least a portion of each of the emitters.
A method of treating a plurality of emitters adapted for use in a field emission display, comprising:
- forming a layer of titanium over at least a portion of each of the emitters;
- heat treating the titanium layer to form a titanium silicide layer;
- and
- heat treating the titanium silicide layer in a nitrogen-bearing gas to form a layer of titanium silicide nitride.
Dependencies are inferred from the claim text.