Contact structure and production method thereof and probe contact assembly using same

A probe contact assembly for establishing electrical connection with contact targets, comprising:

• a contact substrate having a plurality of contactors mounted thereon;
• a probe card for mounting the contact substrate and establishing electrical communication between the contactors and electrodes provided on the probe card;
• and
• a pin block having a plurality of contact pins to interface between the probe card and a semiconductor test system when the pin block is attached to the probe card;
• wherein the contactors are uniformly made of same conductive material thoughout and are mounted vertically on the contact substrate where each of the contactors has an intermediate portion which is substantially straight and is inserted in the through hole provided on the contact substrate in a vertical direction, a contact portion integral to the intermediate portion and positioned at one end of the contactor to function as a contact point, and a base portion provided at another end of the contactor, and a spring portion upwardly inclined relative to the surface of the contact substrate and provided between the base portion and the intermediate portion;
• wherein the spring portion has a straight beam shape and exerts a resilient contact force when the contactor is pressed against the contact target, and a part of the intermediate portion is indented to reduce its width or thickness for promoting flexibility of the contactor.