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AssigneesJasco Corporation, AG Technology Co., Ltd., Kanagawa Academy of Science and Technology
InventorsYoshihito Narita, Hideho Hisada, Tatsuya Miyajima, Osamu Saito, Shinichiro Watanabe, Shinya Saito, Koji Akutsu, Susumu Teruyama, Motoichi Ohtsu
Estimating the term…
In a probe microscope 120 for causing a sample 112 and a tip portion 118a of a probe 118 on the sample side to approach each other, detecting an interaction between the sample 112 and the sample-side probe tip portion 118a, and obtaining surface information of the sample 112 from the interaction, the probe 118 being a flexible needle-like probe; the probe microscope 120 comprises vibrating means 122 capable of rotating the probe 118 while flexing the sample-side tip portion 118a thereof so as to draw a circle having a size corresponding to an increase and decrease in the interaction between the sample surface 112 and the tip portion 118a, and detecting means 124 for detecting the increase and decrease in the size of the circle drawn by the sample-side probe tip portion 118a due to the interaction and obtaining, from the increase and decrease in the size of the circle, information about the distance between the sample 112 and the sample-side probe tip portion 118a.
A probe microscope for causing a measurement sample surface and a tip portion of a probe to approach each other, detecting an interaction between said measurement sample surface and the tip portion of said probe, and obtaining surface information of said measurement sample surface from said interaction;
Dependencies are inferred from the claim text.