Method of changing the surface of a glass substrate containing silver, by using a laser beam
AssigneeNippon Sheet Glass Co., Ltd.
InventorsTadashi Koyama, Keiji Tsunetomo, Masahiro Oikawa, Kenjiro Hamanaka
Life of this patent
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Abstract
A laser processing method for removing glass by melting, evaporation or ablation from sheet-like glass substrate for forming microscopic concavities and convexities. Diffraction grating and planar microlens array obtained thereby.
Claims11
A laser processing method for a glass substrate, comprising radiating a laser beam on the glass substrate, absorbing energy of the laser beam into the glass substrate, and removing a part of the glass by melting, evaporation or ablation due to the energy, wherein microscopic concavities are formed on a surface of said glass substrate by changing the optical path of the laser beam with optical path changing means, thereby moving a spot position of the laser beam radiated on the surface of said glass substrate,
- wherein said optical path changing means comprises a first mirror for moving the spot position of the laser beam in a X-direction on the surface of said glass substrate, and a second mirror for moving the spot position of the laser beam in a Y-direction on the surface of said glass substrate,
- wherein said glass substrate contains silver in the form of Ag atoms, Ag colloid or Ag ions to a predetermined depth or as a whole from the surface, and has a concentration slope of the silver showing the highest concentration at the side surface to be processed and gradually decreasing to the other side surface thereof.
A laser processing method for a glass substrate, comprising:
- providing a glass substrate with silver in the form of Ag atoms, Ag colloid or Ag ions to a predetermined depth or as a whole from the surface, and has a concentration slope of the silver showing the highest concentration at the side surface to be processed and gradually decreasing to the other side surface thereof;
- radiating a laser beam on the glass substrate, absorbing energy of the laser beam into the glass substrate, and removing a part of the glass by melting, evaporation or ablation due to the energy;
- and
- changing the optical path of the laser beam thereby moving a spot position of the laser beam radiating on the surface of the glass substrate to form microscopic concavities on a surface of the glass substrate.
A laser processing method for a glass substrate, comprising:
- providing a glass substrate with silver in the form of Ag atoms, Ag colloid or Ag ions to a predetermined depth and with a concentration slope of the silver showing the highest concentration at the side surface to be processed and gradually decreasing to the other side surface thereof;
- radiating a laser beam on the glass substrate to form microscopic concavities on the side surface of the glass substrate.
Dependencies are inferred from the claim text.