Method and apparatus for automating a microelectric manufacturing process
OwnerMurali D. Rangachari, Arun Kumar Sharma +2inventors
InventorsMurali D. Rangachari, Arun Kumar Sharma, Ramesh Balakrishnan, Balaji Pitchaikani
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Abstract
The present invention provides for a method of automating a microelectronic manufacturing process by configuring application objects that implement a domain knowledge for a piece of equipment and implementing a workflow using the application object where the workflow represents a sequence of steps in the microelectronic manufacturing process. The method is embodied in a computer program that is part of a computer system.
Claims30
A method of automating a manufacturing process, said method comprising the steps of:
- providing an application object, the application object implementing a domain knowledge for equipment used in the manufacturing process;
- and
- implementing a workflow using the application object, the workflow representing a sequence of steps of the manufacturing process.
A computer readable medium having a computer program stored thereon, that, when loaded into a computer, causes the computer to perform a function of automating a manufacturing process, the computer automating the manufacturing process by performing the steps of:
- providing an application object, the application object implementing a domain knowledge for equipment in the manufacturing process;
- and
- implementing a workflow using the application object, the workflow representing a sequence of steps of the manufacturing process.
An apparatus for automating a manufacturing process, comprising:
- a storage device, said storage device containing a computer program for automating the process by performing the steps of:
- providing an application object, the application object implementing a domain knowledge for equipment in the manufacturing process;
- and
- implementing a workflow using the application object, the workflow representing a sequence of steps of said microelectronic manufacturing process;
- a display device for interfacing with the computer program;
- an interfacing device for interfacing with the computer program;
- and
- a processing device for executing said computer program.
A method of automating a manufacturing process, the method comprising the steps of:
- providing an equipment characteristic to implement a domain knowledge for equipment used in the manufacturing process;
- and
- implementing a workflow, the workflow representing a sequence of steps of the manufacturing process.
An electronic signal comprising a computer program wherein the electronic signal contains instructions that perform a method for automating manufacturing process, the method comprising the steps of:
- configuring an equipment characteristic to implement a domain knowledge for equipment used in the manufacturing process;
- and
- implementing a workflow, the workflow representing a sequence of steps of the manufacturing process.
A method of automating a microelectronic manufacturing process comprising the steps of:
- (a) providing an application object implementing multiple variations of a command for corresponding respective versions of a process tool;
- (b) configuring the application object for a specific process tool;
- and
- (c) performing a workflow having a sequence of steps in a microelectronic manufacturing process using a version of the process tool and the application object configured in said step (b).
A method of automating a manufacturing process comprising the steps of:
- (a) providing an application object implementing multiple variations of a command for corresponding respective versions of a process tool;
- (b) configuring the application object for a specific process tool;
- and
- (c) providing a sequence of steps in a manufacturing process using a version of the process tool and the application object configured in said step (b).
Dependencies are inferred from the claim text.