Apparatus for fabricating coating and method of fabricating the coating
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsShunpei Yamazaki, Kenji Itoh, Shigenori Hayashi
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Abstract
In an apparatus for fabricating a carbon coating, an object such as a magnetic recording medium is disposed on a side of an electrode connected to a high-frequency power supply. Ultrasonic vibrations are supplied to the object. Discharge is generated between the electrode connected to the high-frequency power supply and a grounded electrode to fabricate a carbon coating on the surface of the object. Also, an electrode interval is set to 6 mm or less, pressure between the electrodes is set to 15 Torr to 100 Torr, whereby high-density plasma is generated to form an ion sheath on an anode side. Therefore, a coating is fabricated on the surface of the object by bombardment of ions.
Claims52
An optical disk memory comprising:
- an optical disk;
- a protective film provided on a surface of said optical disk and comprising a diamond-like carbon having a thickness of 500 Å or less;
- wherein the number of pin-holes in said diamond-like carbon is 30/mm2 or less.
An optical disk memory comprising:
- an optical disk;
- a protective film provided on a surface of said optical disk and comprising a diamond-like carbon having a thickness of 500 Å or less:
- wherein the number of pin-holes in said diamond-like carbon is 30/mm2 or less;
- wherein said diamond-like carbon transmits light in a visible light region.
An optical disk memory comprising:
- an optical disk;
- a protective film provided on a surface of said optical disk and comprising a diamond-like carbon having a thickness of 500 Å or less;
- wherein the number of pin-holes in said diamond-like carbon is 30/mm2 or less;
- wherein said diamond-like carbon contains at least one of element selected from the group consisting of Si, B, N, P and F.
An optical disk memory comprising:
- a substrate made of an organic resin or industrial plastic material;
- a protective film provided on a surface of said substrate and comprising a diamond-like carbon having a thickness of 500 Å or less;
- wherein the number of pin-holes in said diamond-like carbon is 30/mm2 or less.
An optical disk memory comprising:
- a substrate made of an organic resin or industrial plastic material;
- a protective film provided on a surface of said substrate and comprising a diamond-like carbon having a thickness of 500 Å or less;
- wherein the number of pin-holes in said diamond-like carbon is 30/mm2 or less;
- wherein said diamond-like carbon transmits light in a visible light region.
An optical disk memory comprising:
- a substrate made of an organic resin or industrial plastic material;
- a protective film provided on a surface of said substrate and comprising a diamond-like carbon having a thickness of 500 Å or less;
- wherein the number of pin-holes in said diamond-like carbon is 30/mm2 or less;
- wherein said diamond-like carbon contains at least one of element selected from the group consisting of Si, B, N, P and F.
An optical disk memory comprising:
- an optical disk;
- a protective film provided on a surface of said optical disk and comprising a hard-carbon coating having a thickness of 500 or less;
- wherein the number of pin-holes in said hard-carbon coating is 30/mm2 or less.
An optical disk memory comprising:
- an optical disk;
- a protective film provided on a surface of said optical disk and comprising a hard-carbon coating having a thickness of 500 Å or less:
- wherein the number of pin-holes in said hard-carbon coating is 30/mm2 or less;
- wherein said hard-carbon coating transmits light in a visible light region.
An optical disk memory comprising:
- an optical disk;
- a protective film provided on a surface of said optical disk and comprising a hard-carbon coating having a thickness of 500 Å or less;
- wherein the number of pin-holes in said hard-carbon coating is 30/mm2 or less;
- wherein said hard-carbon coating contains at least one of element selected from the group consisting of Si, B, N, P and F.
An optical disk memory comprising:
- a substrate made of an organic resin or industrial plastic material;
- a protective film provided on a surface of said substrate and comprising a hardcarbon coating having a thickness of 500 Å or less;
- wherein the number of pin-holes in said hard-carbon coating is 30/mm2 or less.
An optical disk memory comprising:
- a substrate made of an organic resin or industrial plastic material;
- a protective film provided on a surface of said substrate and comprising a hard-carbon coating having a thickness of 500 Å or less;
- wherein the number of pin-holes in said hard-carbon coating is 30/mm2 or less;
- wherein said hard-carbon coating transmits light in a visible light region.
An optical disk memory comprising:
- a substrate made of an organic resin or industrial plastic material;
- a protective film provided on a surface of said substrate and comprising a hard-carbon coating having a thickness of 500 Å or less;
- wherein the number of pin-holes in said hard-carbon coating is 30/mm2 or less;
- wherein said hard-carbon coating contains at least one of element selected from the group consisting of Si, B, N, P and F.
Dependencies are inferred from the claim text.