Microelectromechanical system actuator for extended linear motion

A microelectromechanical system actuator having a substrate and a drive mechanism located on the substrate, comprising:

• a drive arm coupled to the drive mechanism wherein the drive mechanism operates to move the drive arm in a first direction when the drive mechanism is activated;
• a pallet coupled to the drive arm for movement therewith, the pallet including a body having a first pallet edge that includes pallet teeth thereon;
• a drive member that is slideably coupled to the substrate, the drive member including a first drive margin having thereon drive teeth that are meshingly engagable with the pallet teeth, and spaced-apart first and second leg portions that define a channel therebetween, and the first drive margin is located on the first leg portion, and a second drive margin having drive teeth thereon is located on the second leg portion;
• and
• a bias member coupled to the substrate and the drive arm to bias the drive arm in a direction opposite the first direction to meshingly engage the drive teeth and the pallet teeth to move the drive member along a linear drive path, and wherein the bias member yields to permit the drive arm to move in the first direction when the drive mechanism is activated to disengage the drive teeth and the pallet teeth.

A microelectromechanical system actuator, comprising:

• a substrate;
• a drive mechanism that provides activated motion in a first direction;
• a drive member slideably coupled to the substrate, the drive member including opposed substantially-linear first and second rows of drive teeth;
• a pallet coupled to the drive mechanism for movement therewith and including opposed plural first and second pallet teeth that are meshingly engagable with the respective first and second rows of drive teeth;
• and
• a bias member that biases the pallet opposite the first direction so that the plural first pallet teeth meshingly engage the first row of drive teeth when the drive mechanism is not activated, the bias member being passive and providing the bias as a static flexure,
• wherein activation of the drive mechanism moves the pallet in the first direction so that the plural second pallet teeth meshingly engage the second row of drive teeth, thereby to move the drive member in translation along a linear drive path.

A microelectromechanical system actuator having a substrate and a drive mechanism located on the substrate, comprising:

• a drive arm coupled to the drive mechanism wherein the drive mechanism operates to move the drive arm in a first direction when the drive mechanism is activated;
• a pallet coupled to the drive arm for movement therewith, the pallet including a body having a first pallet edge that includes pallet teeth thereon;
• a drive member that is slideably coupled to the substrate, the drive member including a first drive margin having thereon drive teeth that are meshingly engagable with the pallet teeth;
• and
• a bias member coupled to the substrate and the drive arm to bias the drive arm in a direction opposite the first direction to meshingly engage the drive teeth and the pallet teeth to move the drive member along a linear drive path, and wherein the bias member yields to permit the drive arm to move in the first direction when the drive mechanism is activated to disengage the drive teeth and the pallet teeth, the bias member being passive and providing the bias as a static flexure.

A microelectromechanical system actuator having a substrate and a drive mechanism located on the substrate, comprising:

• a drive arm coupled to the drive mechanism wherein the drive mechanism operates to move the drive arm in only a first direction when the drive mechanism is activated;
• a pallet coupled to the drive arm for movement therewith, the pallet including a body having a first pallet edge that includes pallet teeth thereon;
• a drive member that is slideably coupled to the substrate, the drive member including a first drive margin having thereon drive teeth that are meshingly engagable with the pallet teeth, and spaced-apart first and second leg portions that define a channel therebetween, and the first drive margin is located on the first leg portion, and a second drive margin having drive teeth thereon is located on the second leg portion;
• and
• a bias member coupled to the substrate and the drive arm to bias the drive arm in a direction opposite the first direction to disengage the drive teeth and the pallet teeth, and wherein the bias member yields to permit the drive arm to move in the first direction when the drive mechanism is activated to meshingly engage the drive teeth and the pallet teeth to move the drive member along a linear drive path.

A microelectromechanical system actuator having a substrate and a drive mechanism located on the substrate, comprising:

• a drive arm coupled to the drive mechanism wherein the drive mechanism operates to move the drive arm in only a first direction when the drive mechanism is activated;
• a pallet coupled to the drive arm for movement therewith, the pallet including a body having a first pallet edge that includes pallet teeth thereon;
• a drive member that is slideably coupled to the substrate, the drive member including a first drive margin having thereon drive teeth that are meshingly engagable with the pallet teeth;
• and
• a bias member coupled to the substrate and the drive arm to bias the drive arm in a direction opposite the first direction to disengage the drive teeth and the pallet teeth, and wherein the bias member yields to permit the drive arm to move in the first direction when the drive mechanism is activated to meshingly engage the drive teeth and the pallet teeth to move the drive member along a linear drive path, the bias member being passive and providing the bias as a static flexure.