Method and apparatus for inspecting or measuring a sample based on charged-particle beam imaging, and a charged-particle beam apparatus

An inspecting or measuring method using a charged-particle beam image comprising the steps of:

• irradiating and scanning a converged charged-particle beam on a sample at least partially covered with an insulation film;
• detecting charged-particles which are released from the sample due to the irradiation and scanning of the charged-particle beam, thereby producing a charged-particle image;
• processing the produced charged-particle image, thereby performing either an inspection or measurement of a pattern formed on the sample by comparing the produced charged-particle image with an image stored in a memory;
• and
• irradiating the sample with a UV light to energize electrons in the insulation film of the sample, thereby making the insulation film conductive.

An apparatus for inspecting or measuring a sample using a charged-particle beam image comprising:

• a stage for placing of a sample having an insulation film;
• a charged-particle source;
• a charged-particle beam focusing system which converges a charged-particle beam emitted by said charged-particle source;
• a scanning unit which deflects the charged-particle beam converged by said charged-particle beam focusing system to irradiate and scan the charged-particle beam to the sample placed on said stage;
• an imaging unit which detects charged-particles released from the sample due to the irradiation and scanning of the charged-particle beam by said scanning unit, thereby producing a charged-particle image;
• an image processing unit which processes the charged-particle image produced by said imaging unit, thereby performing either an inspection or measurement of a pattern formed on the sample by comparing the produced charged-particle image with an image stored in a memory;
• and
• UV light irradiation unit which irradiates the sample with a UV light to energize electrons in the insulation film of the sample, thereby making the insulation film conductive.

A charged-particle beam apparatus comprising:

• a stage for placing a sample;
• a charged-particle source;
• a charged-particle beam focusing system which converges a charged-particle beam emitted by said charged-particle source;
• a scanning unit which deflects the charged-particle beam converged by said charged-particle beam focusing system to irradiate and scan the charged-particle beam to the sample placed on said stage;
• a detector which detects charged-particles released from the sample due to the irradiation and scanning of the charged-particle beam;
• an imaging unit which produces a charged-particle image of the sample using a signal of charged-particles detected by said detector;
• a barrel unit which accommodates said stage, said charged-particle source, said charged-particle beam focusing system, said scanning unit, and said detector;
• and
• a UV light projection unit which projects a UV light to the interior of said barrel unit.