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US 6,462,392 B1Granted
Micromechanical cap structure and the respective manufacturing method
AssigneeRobert Bosch GmbH
InventorsStefan Pinter, Harald Emmerich, Hans-Peter Trah, Helmut Baumann
Life of this patent
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Abstract
A micromechanical cap structure and a corresponding manufacturing method are described, the cap structure having a substrate, in particular in the form of a wafer, having a cavity made therein. The cavity includes a bottom surface and two pairs of opposite parallel side wall sections. The cavity has at least one stabilizing wall section, which connects two side wall sections. This considerably increases the stability of the cap structure.
Claims8
A micromechanical cap structure, comprising:
- a substrate including a cavity, the cavity including a bottom surface and two pairs of opposite, parallel side wall sections, wherein:
- the cavity includes at least one stabilizing wall section that connects two of the side wall sections to each other.
Dependencies are inferred from the claim text.