Method of filtering a fluid
AssigneeSanyo Electric Co., Ltd.
InventorsMotoyuki Tsuihiji, Hirofumi Iinuma
Life of this patent
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Abstract
A fluid is filtered by first preparing a filter which includes a base filter and solid substances provided on the base filter, such that the solid substances differ from objects within the fluid to be filtered that are removed by the filter. The objects of filtration are filtered by supplying the fluid to the filter. During filtration, a force is applied to the filter to move the solid substances and objects deposited on the filter. The application of such force thus allows continuous filtration through the filter. The force can take the form of application of rising bubbles, a mechanical vibration or sonic waves to the filter. The filtration method is useful in processing fluid waste from mechanical processes, such as CMP steps.
Claims48
A method of filtering a fluid, comprising:
- preparing a filter comprising a base filter and releasable solid substances provided on the base filter, said solid substances differing from objects of filtration in the fluid;
- filtering the objects of filtration by supplying the fluid to the filter;
- and
- applying a force to the filter to move the solid substances and objects deposited on the filter while continuing to filter the objects.
A method of filtering a fluid, comprising:
- providing a base filter into a tank;
- supplying a fluid comprising objects of filtration and solid substances into the tank;
- passing the fluid through the base filter to deposit the solid substances thereon as a secondary filter and to filter the objects of filtration;
- and
- applying a force to the secondary filter to move the solid substances and any objects deposited on the base filter while continuing to filter the objects of filtration.
A method of filtering a fluid comprising liquid and removable objects, said method comprising:
- preparing a filter assembly comprising a first filter film and a releasable second filter film by forming said second filter film on said first filter film, said second filter film comprising solid particles differing from said removable objects;
- placing said filter assembly with the outer surface of said second film disposed substantially vertically;
- operating said filter assembly by passing at least part of said liquid component through said first and second filter films, thereby removing at least some of said objects from said fluid;
- and
- applying rising gas bubbles to said second film while continuing to filter and fluid by operating the filter assembly.
A method of filtering a fluid, comprising:
- preparing a filter comprising a base filter and releasable solid substances provided on the base filter, said solid substances differing from objects of filtration in the fluid;
- faltering the objects of filtration by supplying the fluid to the filter;
- and
- refreshing the filter to allow continuous filtration by moving the solid substances and objects deposited on the filter.
Dependencies are inferred from the claim text.