Process for producing high-purity Mn materials
AssigneeJapan Energy Corporation
InventorsYuichiro Shindo, Tsuneo Suzuki
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Abstract
A process for producing a high-purity Mn material comprising the steps of premelting crude Mn at 1250-1500° C. and vacuum distilling the melt at 1100-1500° C. The degree of vacuum during the vacuum distillation ranges from 5×10−6 torr to 10 torrs. A crucible for use in the vacuum distillation is a double crucible, which consists of inner and outer crucibles, and a carbon felt packed in the space therebetween. A high-purity Mn material for thin film deposition which contains a total of not more than 100 ppm impurity metallic elements, not more than 200 ppm oxygen, not more than 50 ppm nitrogen, not more than 50 ppm S, and not more than 100 ppm C.
Claims4
A process for producing a high-purity Mn material comprising the steps of premelting an electrolytic Mn at 1250-1500° C. in an inert gas atmosphere over a holding time of at least one hour, and then vacuum distilling the resulting melt at 1100-1500° C.
Dependencies are inferred from the claim text.