Method of fabricating optical waveguide device
AssigneeOki Electric Industry Co., Ltd.
InventorsAkihiko Nishiki, Shigeki Ogura
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Abstract
A method of fabricating an optical waveguide device has the steps of forming a Bragg grating by applying ultraviolet light to an optical waveguide to generate photoinduced refractive index changes, and adjusting characteristics of the Bragg grating by applying ultraviolet light for trimming to the optical waveguide. The Bragg grating forming step is executed by applying ultraviolet light to the optical waveguide through a phase mask, and the adjusting step is executed by applying ultraviolet light for trimming to the optical waveguide not through the phase mask.
Claims18
A method of fabricating an optical waveguide device comprising the steps of:
- forming a Bragg grating by applying ultraviolet light to an optical waveguide to generate photoinduced refractive index changes;
- and
- adjusting characteristics of the Bragg grating by applying ultraviolet light for trimming to the optical waveguide;
- wherein, in said adjusting step, a distribution of total energy of ultraviolet light applied to the optical waveguide per unit area is even over an entire longitudinal range of an area in which the Bragg grating is formed.
A method of fabricating an optical waveguide device comprising the steps of:
- forming a Bragg grating by applying ultraviolet light to an optical waveguide to generate photoinduced refractive index changes;
- and
- adjusting characteristics of the Bragg grating by applying ultraviolet light for trimming to the optical waveguide;
- wherein, in said adjusting step, a distribution of total energy of ultraviolet light applied to the optical waveguide per unit area is a trapezoidal profile gradually descending in the vicinity of both longitudinal edges of an area in which the Bragg grating is formed.
A method of fabricating an optical waveguide device comprising the steps of:
- forming a Bragg grating by applying ultraviolet light to an optical waveguide to generate photoinduced refractive index changes;
- and
- adjusting characteristics of the Bragg grating by applying ultraviolet light for trimming to the optical waveguide;
- wherein, in said forming step, a distribution of total energy of ultraviolet light applied to the optical waveguide per unit area gradually descends in the vicinity of both longitudinal edges of an area in which the Bragg grating is formed;
- and
- wherein, in said adjusting step, a distribution of total energy of ultraviolet light applied to the optical waveguide per unit area is a trapezoidal profile gradually descending in the vicinity of both longitudinal edges of an area in which the Bragg grating is formed.
A method of fabricating an optical waveguide device comprising the steps of:
- forming a Bragg grating by applying ultraviolet light to an optical waveguide to generate photoinduced refractive index changes;
- and
- adjusting characteristics of the Bragg grating by applying ultraviolet light for trimming to the optical waveguide;
- wherein, in said adjusting step, a distribution of total energy of ultraviolet light applied to the optical waveguide per unit area gradually increases or decreases along a longitudinal direction of an area in which the Bragg grating is formed.
A method of fabricating an optical waveguide device comprising the steps of:
- forming a Bragg grating by applying ultraviolet light to an optical waveguide to generate photoinduced refractive index changes;
- and
- adjusting characteristics of the Bragg grating by applying ultraviolet light for trimming to the optical waveguide;
- wherein, in said adjusting step, a distribution of total energy of ultraviolet light applied to the optical waveguide per unit area continuously varies along a longitudinal direction of an area in which the Bragg grating is formed.
Dependencies are inferred from the claim text.