Surface texture measuring instrument, surface texture measuring method and stylus radius measuring instrument
AssigneeMitutoyo Corporation
InventorIsamu Takemura
Life of this patent
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Abstract
A Stylus 1 is moved along the surface of a workpiece 20 and the surface texture of the workpiece 20 is measured based on the displacement of the stylus 1 in the Z direction. A spherical reference gage of known radius is measured with the stylus 1 in advance and radius values r of the tip sphere of the stylus 1 are calculated according to angle by subtracting the radius R of the reference gage from the measured values. The actual contour of workpiece 20 is calculated by using the radius values r as the correction data according to angle and subtracting the correction values according to angle and subtracting the correction values according to angle from the measured data obtained by movement along the surface of workpiece 20.
Claims13
A surface texture measuring instrument for measuring a surface texture of a workpiece, said instrument comprising:
- a stylus moving along a surface of the workpiece;
- a measurement section for measuring a displacement of the stylus;
- a memory section for storing radius values according to angle of the stylus;
- a correction section for correcting a measured value obtained in the measurement section of the basis of the radius values of the stylus stored in the memory section.
A method of measuring a surface texture of a workpiece, said method comprising:
- measuring a displacement of a stylus while moving the stylus along a surface of the workpiece;
- correcting a measured value obtained in the measuring step by using a correction value on the basis of radius values according to angle of the stylus.
Dependencies are inferred from the claim text.