Method and device for production of components for microfabrication
AssigneeUniversidad de Sevilla
InventorAlfonso Gañán-Calvo
Life of this patent
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Abstract
Atomized particles within a desired size range (e.g., 1 micron to about 5 microns) are produced from two immiscible fluids, a first fluid source containing the formulation to be atomized, and a second fluid source which is contained in a pressure chamber surrounding at least the area where the first liquid is to be provided. The invention provides methods for: the production of templates for microfabrication, such as particles that serve as templates for self-assembly of monolayers; the creation of small particles to serve as building blocks for the microassembly of objects; and the use of an atomizate to etch configurations and/or patterns onto the surface of an object by removing a selected portion of the surface.
Claims7
A method, comprising the steps of:
- forcing a first fluid through a channel of a feeding source in a manner which causes the first fluid to be expelled from an exit opening;
- forcing a second fluid immiscible with the first fluid through a pressure chamber in a manner which causes the second fluid to interact with the first fluid to create a virtual focusing funnel around the first fluid whereby both the first and second fluids exit the pressure chamber from an exit orifice downstream of a flow path of the first fluid expelled from the exit opening of the feeding source;
- wherein a stable first fluid-second fluid interface is maintained and the first liquid forms a stable jet focused to smaller dimensions on the exit orifice of the pressure chamber by the second fluid.
Dependencies are inferred from the claim text.