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US 6,446,316 B1Granted
Method for producing an encapsulation for a SAW component operating with surface acoustic waves
AssigneeSiemens Matsushita Components GmbH & Co. KG
InventorsBruno Fürbacher, Friedrich Lupp, Wolfgang Pahl, Günter Trausch
Life of this patent
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Abstract
An encapsulation for SAW components and a method for producing the encapsulation use a cap to seal component structures on a substrate. The cap is in the form of a cover on the substrate and has cutouts which accommodate the component structures in regions of the component structures.
Claims2
A method for producing an encapsulation for a surface acoustic wave (SAW) component having a substrate and SAW component structures on the substrate, which comprises:
- producing a cap by providing a plastic frame-shaped carrier directly on the component substrate with a first photoresist layer applied directly on the component substrate, the carrier accommodating and surrounding the SAW component structures such that at least one cutout is placed in a region of the SAW component structures for accommodating the SAW component structures within the at least one cutout and covering the carrier with a second photoresist layer to encapsulate the SAW component structures on the substrate with the cap;
- and
- directly encapsulating the cap covering the SAW component structures onto the substrate with a plastic sheath by a sheathing process that is selected from dipping, sintering, potting, extrusion coating and press coating, using plastic components on a base of reactive resin or melted thermoplastics.
Dependencies are inferred from the claim text.