Back to results
US 6,446,017 B1Granted
Method and system for tracking manufacturing data for integrated circuit parts
AssigneeMicron Technology, Inc.
InventorBeth Skidmore
Life of this patent
Estimating the term…
Abstract
An apparatus and method for tracking data for individual integrated circuits through the manufacturing process is described by programming an individual part identifier into a non-volatile portion of the integrated circuit and maintaining a database of all manufacturing step statistics for later review and analysis. The part identifier allows individual integrated circuits to be moved through the manufacturing process without the need to physically track original fabrication lots. The database of information is used to improve the manufacturing process by identifying failure trends based upon process variations.
Claims24
A method for tracking fabrication information for the manufacture of memory devices, comprising:
- manufacturing a plurality of wafers, each containing a plurality of memory devices, by performing a plurality of processing steps and storing process data associated with each processing step;
- assigning a lot number for the plurality of wafers;
- assigning a part identifier to each of the plurality of memory devices;
- programming the part identified into a non-volatile section of each of the plurality of memory devices;
- associating the lot number with the part identifier for each of the plurality of memory devices;
- reading the part identifier for each of the plurality of memory devices;
- testing each of the plurality of memory devices to produce test results;
- recording the test results for each of the plurality of memory devices;
- saving the process data and the test results to a memory in a computer;
- associating the process data and the test results with the part identifier and the lot number for each of the plurality of memory devices in a database to associate error information with at least one of the process data and the test results;
- and
- sorting the associated process data;
- the test results and the part identifier to construct data summaries of manufacturing processes.
10 more elements
A method for tracking fabrication information for the manufacture of IC parts, comprising:
- manufacturing a plurality of wafers, each containing a plurality of IC parts, by performing a plurality of processing steps and storing process data associated with each processing step;
- assigning a lot number for the plurality of wafers;
- assigning a part identifier to each of the plurality of IC parts;
- programming the part identifier into a non-volatile section of each of the plurality of IC parts;
- associating the lot number with the part identifier for each of the plurality of IC parts;
- reading the part identifier for each of the plurality of IC parts;
- testing each of the plurality of IC parts to produce test results;
- recording the test results for each of the plurality of IC parts;
- saving the process data and the test results to a memory;
- associating the process data and the test results with the part identifier and the lot number for each of the plurality of IC parts in a database to associate error information with at least one of the process data and the test results;
- and
- sorting the associated process data, the test results and the part identifier to construct data summaries of manufacturing processes.
9 more elements
A method for tracking fabrication information for the manufacture of IC parts, comprising:
- manufacturing a plurality of IC parts on a wafers by performing a plurality of processing steps and storing process data associated with each processing step;
- assigning a part identifier to each of the plurality of IC parts;
- assigning a lot number to the wafer;
- programming the part identifier into a non-volatile section of each of the plurality of IC parts;
- associating the lot number with the part identifier for each of the plurality of IC parts;
- reading the part identifier for each of the plurality of IC parts;
- testing each of the plurality of IC parts to produce test results;
- recording the test results for each of the plurality of IC parts;
- saving the process data and the test results to a memory;
- associating the process data and the test results with the part identifier and the lot number for each of the plurality of IC parts in a database to associate error information with at least one of the process data and the test results;
- and
- sorting the associated process data, the test results and the part identifier to construct data summaries of manufacturing processes.
9 more elements
A method for tracking fabrication information for the manufacture of memory devices, comprising:
- providing a plurality of wafers;
- dividing the plurality of wafers into lots;
- assigning a lot number to each lot;
- proforming a plurality of processing steps on each lot of wafers to form a plurality of memory devices on each wafer;
- storing process data associated with at least one of the plurality of processing steps;
- assigning a part identifier to each of the plurality of memory devices;
- programming the part identifier into a non-volatile section of each of the plurality of memory devices;
- associating the lot number with the part identifier for each of the plurality of memory devices;
- reading the part identifier for each of the plurality of memory devices;
- testing each of the plurality of memory devices to produce test results;
- recording the test results for each of the plurality of memory devices;
- saving the process data and the test results to a memory in a computer;
- associating the process data and the test results with the part identifier and the lot number for each of the plurality of memory devices in a database to associate error information with at least one of the process data and the test results;
- and
- sorting the associated process data, the test results and the part identifier to construct data summaries of manufacturing processes.
12 more elements
Dependencies are inferred from the claim text.