US 6,445,842 B1 · Microelectromechanical optical cross-connect switches including mechanical actuators and methods of operating same

Abstract

Microelectromechanical (MEM) Optical Cross-connect (OXC) switches having mechanical actuators are discussed. In particular, the MEM OXC switches can include a plurality of reflectors, wherein each of the plurality of the reflectors is movable to at least one of a respective first reflector position along a respective optical beam path from an associated input of the MEM OXC switch to an associated output thereof and a respective second reflector position outside the optical beam path. A mechanical actuator moves to at least one of a first mechanical actuator position and a second mechanical actuator position. A selector selects ones of the plurality of reflectors to be coupled to the mechanical actuator and at least one of the plurality of reflectors to be decoupled from the mechanical actuator, wherein the mechanical actuator is coupled to the selected ones of the plurality of reflectors in the first actuator position and wherein the mechanical actuator moves the selected ones of the plurality of reflectors from the respective first reflector positions to the respective second reflector positions when the mechanical actuator moves from the first mechanical actuator position to the second mechanical actuator position. Related methods are also discussed.

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Drawings

Claims63

Dependent claims

A microelectromechanical optical cross-connect switch that switches optical energy from an input of the microelectromechanical optical cross-connect switch to an output of the microelectromechanical optical cross-connect switch, the microelectromechanical optical cross-connect switch comprising:

a substrate
a plurality of reflectors, on the substrate, wherein the each of the plurality of reflectors is movable to at least one of a respective first reflector position along an optical beam path from an input of the microelectromechanical optical cross-connect switch to an output thereof and a respective second reflector position outside the optical beam path;
a mechanical actuator that is movable to at least one of a first mechanical actuator position and a second mechanical actuator position;
and
a selector that selectively couples at least one of the plurality of reflectors to the mechanical actuator such that the at least one of the plurality of reflectors moves from the first reflector position to the second reflector position when the mechanical actuator moves from the first mechanical actuator position to the second mechanical actuator position.

2 more elements

a substrate;
a reflector, on the substrate, wherein the reflector is movable to at least one of a first reflector position along an optical beam path from an associated input of the microelectromechanical optical cross-connect switch to an associated output thereof and a second reflector position outside the optical beam path;
a mechanical actuator that is movable to at least one of a first mechanical actuator position and a second mechanical actuator position;
and
a selector that selects a reflector to be coupled to the mechanical actuator, wherein a selected reflector is coupled to the mechanical actuator in the first mechanical actuator position so that the mechanical actuator moves the reflector from the first reflector position to the second position when the mechanical actuator moves from the first mechanical actuator position to the second mechanical actuator position.

2 more elements

a substrate;
a plurality of reflectors, on the substrate, wherein at least one of the plurality of reflectors is movable to at least one of a first reflector position along an optical beam path from an associated input of the microelectromechanical optical cross-connect switch to an associated output thereof and a second reflector position outside the optical beam path;
a mechanical actuator that moves selected ones of the plurality of reflectors from respective first reflector positions to respective second reflector positions;
and
a selector that selects ones of the plurality of reflectors to be coupled to the mechanical actuator and at least one of the plurality of reflectors to be decoupled from the mechanical actuator, wherein the mechanical actuator is coupled to the selected ones of the plurality of reflectors in the first actuator position and wherein the mechanical actuator moves the selected ones of the plurality of reflectors from the respective first reflector positions to the respective second reflector positions when the mechanical actuator moves from the first mechanical actuator position to the second mechanical actuator position.

2 more elements

Dependencies are inferred from the claim text.

Description4,867 words

Summary767 words

#The present invention relates to the field of microelectromechanical devices, and more particularly, to microelectromechanical optical switches.

#Microelectromechanical (MEM) technology has been used in a wide range of applications. For example, MEM devices can be used to switch optical energy from the switch inputs to selected switch outputs. MEM optical switches, sometimes referred to as Optical Cross-Connect (OXC) switches can include an N×N array of reflectors to reflect optical energy from any switch input to any switch output. For example, in a 2×2 OXC, a selected reflector of the 2×2 array can be used to reflect the optical energy from any switch input to any switch output. The selected reflector can be located in the array where the column associated with input and the row associated with the output intersect. The selected reflector can be placed in a reflecting position to reflect the optical energy from the input to the selected output. The other reflectors can be placed in a non-reflecting position so as not to impede the propagation of the optical energy from the input to the selected reflector and to the output.

#Some conventional MEM OXC switches operate by orienting the reflectors of the array using magnetic fields. In particular, the reflectors therein may be oriented horizontally (in the plane of the substrate on which the reflector is located) in a non-reflecting position and vertically (orthogonal to the substrate) in a reflecting position. Therefore, to switch optical energy from an input of the OXC switch to an output thereof, the, selected reflector can be oriented vertically and the other reflectors are oriented horizontally. Magnetically actuated MEM OXC switches are described further, for example, in U.S. patent application Ser. No. 09/489,264 filed Jan. 21, 2000, entitled “MEMs Optical Cross-Connect Switch”, the disclosure of which is hereby incorporated herein by reference in its entirety.

Brief description of the drawings11 figures

#FIG. 1 is a perspective view of an embodiment of a 2×2 Microelectromechanical (MEM) Optical Cross-Connect (OXC) switch according to the present invention.

#FIGS. 2A-2D are schematic cross-sectional views of an embodiment of a 2×2 MEM OXC switch according to the present invention that illustrate operations thereof.

#FIG. 3 is a plan view of an embodiment of a reflector having associated flexible elements according to the present invention.

Detailed description3,868 words

#The present invention now will be described more fully hereinafter with reference to the accompanying drawings, in which preferred embodiments of the invention are shown. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. In the drawings, the thickness of layers and regions are exaggerated for clarity. Like numbers refer. to like elements throughout.

#It will be understood that when an element such as a layer, region or substrate is referred to as being “on” another element, it can be directly on the other element or intervening elements may also be present.

#FIG. 1 is a perspective view of an embodiment of a 2×2 MEM OXC according to the present invention. The 2×2 MEM OXC switch (the switch) includes four reflectors 105a-d that can be moved from respective reflecting positions to non-reflecting positions by a mechanical actuator 120 that moves from a first to a second mechanical actuator position in a direction 125 that is substantially perpendicular to a substrate 100. The reflecting position can include reflector positions that allow optical energy from an input to reflect to an output. The non-reflecting position can include reflector positions that avoid the reflection of optical energy from an input to an output. The substrate 100 can be silicon or other materials may be used.

Facts

Application

09/542,170Filed 5 Apr 2000

Granted

3 Sep 2002

Term ended

5 Apr 2020

Estimated · how

20 years from earliest known nonprovisional domestic filing. Maintenance-fee lapses, terminal disclaimers and statutory extensions have not been checked. The continuity chain may be incomplete; this is not an enforceability determination. Patent term adjustment is unavailable; no adjustment was added.

Classification7 codes

G02B 6/3514
The optical element being reflective, e.g. mirror: the reflective optical element moving along a line so as to translate into and out of the beam…
G02B 26/0833
By means of one or more reflecting elements: the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
G02B 26/0841
The reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD: the reflecting element being moved or deformed by electrostatic means
G02B 6/3546
2D constellations, i.e. with switching elements and switched beams located in a plane: nxM switch, i.e. a regular array of switches elements of…

Description4,867 words

Summary767 words

#The present invention relates to the field of microelectromechanical devices, and more particularly, to microelectromechanical optical switches.

Brief description of the drawings11 figures

#FIG. 1 is a perspective view of an embodiment of a 2×2 Microelectromechanical (MEM) Optical Cross-Connect (OXC) switch according to the present invention.

#FIGS. 2A-2D are schematic cross-sectional views of an embodiment of a 2×2 MEM OXC switch according to the present invention that illustrate operations thereof.

#FIG. 3 is a plan view of an embodiment of a reflector having associated flexible elements according to the present invention.

Detailed description3,868 words

Microelectromechanical optical cross-connect switches including mechanical actuators and methods of operating same

Life of this patent

Microelectromechanical optical cross-connect switches including mechanical actuators and methods of operating same

Life of this patent

Life of this patent

Abstract

Drawings

Drawings

Claims63

Description4,867 words

Drawings

Classification7 codes

Life of this patent

Description4,867 words