Optomechanical matrix switches including collimator arrays

An optical crossbar switch, comprising:

• an array of input fibers;
• a substrate;
• an array of collimator elements, each of said collimator elements being coupled to one of said input fibers;
• a MEMS optomechanical switching cell, comprising:
• an electrode coupled to said substrate, said electrode capable of receiving an electrical signal;
• an actuator, movably coupled to said substrate via a hinge, said electrode and said actuator capable of generating an electrically induced force therebetween, wherein said actuator is capable of moving in response to a change in said electrically induced force;
• and
• a reflective element mounted to said actuator, a reflective surface of said reflective element displacing substantially in a single plane in response to movement of said actuator;
• and
• an array of said MEMS optomechanical switching cells, each of said MEMS optomechanical switching cells being in optical alignment with at least one of said collimator elements.

A distributed matrix switch, comprising:

• a first optomechanical matrix switch, said first optomechanical matrix switch including a first of substrate and a first plurality of MEMS optomechanical switching cells, wherein at least one of said first plurality of MEMS optomechanical switching cells comprises:
• an electrode coupled to said first substrate, said electrode capable of receiving an electrical signal;
• an actuator, movably coupled to said first substrate via a hinge, said electrode and said actuator capable of generating an electrically induced force therebetween, wherein said actuator is capable of moving in response to a change in said electrically induced force;
• and
• a reflective element mounted to said actuator, a reflective surface of said reflective element displacing substantially in a single plane in response to movement of said actuator;
• a second optomechanical matrix switch, said second optomechanical matrix switch including a second substrate and a second plurality of MEMS optomechanical switching cells, wherein at least one of said plurality of MEMS optomechanical switching cells comprises:
• an electrode coupled to said second substrate via a hinge, said electrode capable of receiving an electrical signal;
• an actuator, movably coupled to said second substrate, said electrode and said actuator capable of generating an electrically induced force therebetween, wherein said actuator is capable of moving in response to a change in said electrically induced force;
• and
• a reflective element mounted to said actuator, a reflective surface of said reflective element displacing substantially in a single plane in response to movement of said actuator;
• and
• a first collimator array in optical alignment with said first and second pluralities of MEMS optomechanical switching cells.

An optomechanical filter module, comprising:

• a substrate;
• a plurality of MEMS optomechanical filter elements coupled to said substrate;
• and
• a first array of collimator elements, each of said collimator elements in optical alignment with one of said optomechanical filter elements;
• wherein at least one of said MEMS optomechanical filter elements comprise:
• an electrode coupled to said substrate, said electrode capable of receiving an electrical signal;
• an actuator, movably coupled to said substrate via a hinge, said electrode and said actuator capable of generating an electrically induced force therebetween, wherein said actuator is capable of moving in response to a change in said electrically induced force;
• and
• a reflective element mounted to said actuator, a reflective surface of said reflective element displacing substantially in a single plane in response to movement of said actuator.

An optomechanical broadcast switch, comprising:

• a substrate;
• an optomechanical matrix switch having a plurality of MEMS switching cells, wherein at least one of said MEMS switching cells comprises:
• an electrode coupled to said substrate, said electrode capable of receiving an electrical signal;
• an actuator, movably coupled to said substrate, said electrode and said actuator capable of generating an electrically induced force therebetween, wherein said actuator is capable of moving in response to a change in said electrically induced force;
• and
• a reflective element mounted to said actuator, a reflective surface of said reflective element displacing substantially in a single plane in response to movement of said actuator;
• a right angle prism in optical alignment with said MEMS switching cells;
• and
• a dielectric beam splitter having a plurality of stages in optical alignment with respective ones of said plurality of MEMS switching cells, each of said stages in optical alignment with said right angle prism.