Micromachined optical switching devices

An optomechanical matrix switch, comprising:

• a substrate;
• a MEMS optomechanical switching cell, comprising:
• an electrode coupled to said substrate, said electrode capable of receiving an electrical signal;
• an actuator, movably coupled to said substrate via a hinge, said electrode and said actuator capable of generating an electrically induced force therebetween, wherein said actuator is capable of moving in response to a change in said electrically induced force;
• and
• a reflective element mounted to said actuator, a reflective surface of said reflective element displacing substantially in a single plane in response to movement of said actuator;
• a first plurality of said MEMS optomechaincal switching cells coupled to said substrate, said first plurality of optomechanical switching cells in optical alignment with a corresponding plurality of first input ports and with a first output port;
• and
• a second plurality of said MEMS optomechanical switching cells coupled to said substrate, said second plurality of optomechanical switching cells in optical alignment with a corresponding plurality of second output ports.

An optomechanical matrix switch, comprising:

• a substrate;
• a MEMS optomechanical switching cell, comprising:
• an electrode coupled to said substrate, said electrode capable of receiving an electrical signal;
• an actuator, movably coupled to said substrate via a hinge, said electrode and said actuator capable of generating an electrically induced force therebetween, wherein said actuator is capable of moving in response to a change in said electrically induced force;
• and
• a reflective element mounted to said actuator, a reflective surface of said reflective element displacing substantially in a single plane in response to movement of said actuator;
• a first plurality of said MEMS optomechanical switching cells coupled to said substrate, each of said first plurality of optomechanical switching cells in optical alignment with a first input port;
• a second plurality of said MEMS optomechanical switching cells coupled to said substrate, each of said second plurality of optomechaincal switching cells in optical alignment with a second input port;
• a third plurality of said MEMS optomechanical switching cells coupled to said substrate, each of said third plurality of optomechanical switching cells in optical alignment with a third input port;
• and
• a fourth plurality of said MEMS optomechanical switching cells coupled to said substrate, each of said fourth plurality of optomechaincal switching cells in optical alignment with a fourth input port.

An optomechanical matrix switch, comprising:

• a substrate;
• a MEMS optomechanical switching cell, comprising:
• an electrode coupled to said substrate, said electrode capable of receiving an electrical signal;
• an actuator, movably coupled to said substrate via a hinge, said electrode and said actuator capable of generating an electrically induced force therebetween, wherein said actuator is capable of moving in response to a change in said electrically induced force;
• and
• a reflective element mounted to said actuator, a reflective surface of said reflective element displacing substantially in a single plane in response to movement of said actuator;
• a first plurality of said MEMS optomechanical switching cells coupled to said substrate, said first plurality of optomechanical switching cells in optical alignment with a corresponding plurality of first input ports and with a first output port;
• a second plurality of said MEMS optomechanical switching cells coupled to said substrate, said second plurality of optomechanical switching cells in optical alignment with a corresponding plurality of second output ports;
• a third plurality of said MEMS optomechanical switching cells coupled to said substrate, said third plurality of optomechanical switching cells in optical alignment with a corresponding plurality of third input ports and with a third output ports;
• and
• a fourth plurality of said HEMS optomechanical switching cells coupled to said substrate, said fourth plurality of optomechanical switching cells in optical alignment with a corresponding plurality of fourth output ports.

An optomechanical matrix switch, comprising:

• a substrate;
• a MEMS optomechanical switching cell, comprising:
• an electrode coupled to said substrate, said electrode capable of receiving an electrical signal;
• an actuator, movably coupled to said substrate via a hinge, said electrode and said actuator capable of generating an electrically induced force therebetween, wherein said actuator is capable of moving in response to a change in said electrically induced force;
• and
• a reflective element mounted to said actuator, a reflective surface of said reflective element displacing substantially in a single plane in response to movement of said actuator;
• a first plurality of said MEMS optomechaincal switching cells coupled to said substrate, each of said first plurality of optomechanical switching cells in optical alignment with one of a corresponding first plurality of input ports and with one of a corresponding first plurality of output ports;
• and
• a second plurality of said MEMS optomechanical switching cells coupled to said substrate, each of said second plurality of optomechanical switching cells in optical alignment with one of a corresponding second plurality of input ports and with one of a corresponding second plurality of output ports.

An optomechanical matrix switch, comprising:

• a substrate;
• a MEMS optomechanical switching cell, comprising:
• an electrode coupled to said substrate, said electrode capable of receiving an electrical signal;
• an actuator, movably coupled to said substrate via a hinge, said electrode and said actuator capable of generating an electrically induced force therebetween, wherein said actuator is capable of moving in response to a change in said electrically induced force;
• and
• a reflective element mounted to said actuator, a reflective surface of said reflective element displacing substantially in a single plane in response to movement of said actuator;
• a first plurality of said MEMS optomechaincal switching cells coupled to said substrate, each of said first plurality of optomechanical switching cells in optical alignment with one of a corresponding first plurality of input ports arranged along a first border of said matrix switch and with one of a corresponding first plurality of output ports arranged along a second border of said matrix switch;
• and
• a second plurality of said MEMS optomechanical switching cells coupled to said substrate, each of said second plurality of optomechanical switching cells in optical alignment with one of a corresponding second plurality of input ports arranged along a third border of said matrix switch and with one of a corresponding second plurality of output ports arranged along a fourth border of said matrix switch.

An optomechanical matrix switch, comprising:

• a substrate;
• a MEMS optomechanical switching cell, comprising:
• an electrode coupled to said substrate, said electrode capable of receiving an electrical signal;
• an actuator, movably coupled to said substrate via hinge, said electrode and said actuator capable of generating an electrically induced force therebetween, wherein said actuator is capable of moving in response to a change in said electrically induced force;
• and
• a reflective element mounted to said actuator, a reflective surface of said reflective element displacing substantially in a single plane in response to movement of said actuator;
• a first plurality of said MEMS optomechanical switching cells coupled to said substrate, each of said first plurality of optomechanical switching cells in optical alignment with one of a corresponding first plurality of input ports and with one of a corresponding first plurality of output ports;
• a second plurality of said MEMS optomechanical switching cells coupled to said substrate, each of said second plurality of optomechanical switching cells in optical alignment with one of a corresponding second plurality of input ports and with one of a corresponding second plurality of output ports;
• a third plurality of said MEMS optomechanical switching cells coupled to said substrate, each of said third plurality of optomechanical switching cells in optical alignment with one of a corresponding third plurality of input ports and with one of a corresponding third plurality of output ports;
• and
• a fourth plurality of said MEMS optomechanical switching cells coupled to said substrate, each of said fourth plurality of optomechanical switching cells in optical alignment with one of a corresponding fourth plurality of input ports and with one of a corresponding fourth plurality of output ports.

An optomechanical matrix switch, comprising:

• a substrate;
• a MEMS optomechanical switching cell, comprising:
• an electrode coupled to said substrate, said electrode capable of receiving an electrical signal;
• an actuator, movably coupled to said substrate via a hinge, said electrode and said actuator capable of generating an electrically induced force therebetween, wherein said actuator is capable of moving in response to a change in said electrically induced force;
• and
• a reflective element mounted to said actuator, a reflective surface of said reflective element displacing substantially in a single plane in response to movement of said actuator;
• a plurality of said MEMS optomechanical switching cells coupled to said substrate, each of said plurality of optomechanical switching cells in optical alignment with
• one of a corresponding plurality of input ports,
• one of a corresponding plurality of first output ports, and
• one of a corresponding plurality of second output ports.

An optomechanical matrix switch, comprising:

• a substrate;
• a MEMS optomechanical switching cell, comprising:
• an electrode coupled to said substrate, said electrode capable of receiving an electrical signal;
• an actuator, movably coupled to said substrate via a hinge, said electrode and said actuator capable of generating an electrically induced force therebetween, wherein said actuator is capable of moving in response to a change in said electrically induced force;
• and
• a reflective element mounted to said actuator, a reflective surface of said reflective element displacing substantially in a single plane in response to movement of said actuator;
• a first plurality of said MEMS optomechanical switching cells;
• a second plurality of said MEMS optomechanical switching cells;
• an add port in optical alignment with said first plurality of MEMS optomechanical switching cells;
• a drop port in optical alignment with said second plurality of MEMS optomechanical switching cells;
• a plurality of output ports, wherein each one of said plurality of output ports is in optical alignment with a respective one MEMS optomechanical switching cell of said first plurality of MEMS optomechanical switching cells;
• and
• a plurality of input ports, wherein each one of said plurality of input ports is in optical alignment with a respective one MEMS optomechanical switching cell of said second plurality of MEMS optomechanical switching cells, and wherein each one of said plurality of input ports is in optical alignment with a respective one of said plurality of output ports.

An optomechanical matrix switch, comprising:

• a substrate;
• a MEMS optomechanical switching cell, comprising:
• an electrode coupled to said substrate, said electrode capable of receiving an electrical signal;
• an actuator, pivotably coupled to said substrate via a hinge, said electrode and said actuator capable of generating an electrostatic force therebetween, wherein said actuator is capable of moving in response to a change in said electrostatic force;
• and
• a reflective element mounted to said actuator, a reflective surface of said reflective element displacing substantially in a single plane in response to movement of said actuator;
• a first plurality of said MEMS optomechanical switching cells;
• a second plurality of said MEMS optomechanical switching cells;
• an add port in optical alignment with said first plurality of MEMS optomechanical switching cells;
• a drop port in optical alignment with said second plurality of MEMS optomechanical switching cells;
• a plurality of output ports, wherein each one of said plurality of output ports is in optical alignment with a respective one MEMS optomechanical switching cell of said first plurality of MEMS optomechanical switching cells;
• and
• a plurality of input ports, wherein each one of said plurality of input ports is in optical alignment with a respective one MEMS optomechanical switching cell of said second plurality of MEMS optomechanical switching cells, and wherein each one of said plurality of input ports is in optical alignment with a respective one of said plurality of output ports.