Air bearing slider

Abstract

A slider includes an air bearing surface (ABS) including a plurality of separate coplanar pads, a cavity recessed to a certain depth beneath the level of the ABS, and a plurality of steps in which each step is disposed at a level between that of the ABS and that of the cavity. The plurality of steps include a trailing edge step and a leading edge step, and in some embodiments a first side step and a second side step. The leading edge step is provided at a level deeper than that of the trailing edge step. The first side step and the second side step may be provided at the same or different levels to tailor the flight characteristics of the slider. A process is also disclosed for the fabrication of a slider of the present invention. The process includes at least three cycles of masking, etching, and stripping in order to form at least three successively deeper levels, the deepest level being the cavity. Selective masking of the substrate allows portions of the substrate to be preserved through successive etching operations to become the ABS and the plurality of steps.

Dependencies are inferred from the claim text.