Lens system, in particular projection lens system in semiconductor lithography
AssigneeCarl-Zeiss-Stiftung
InventorKarlfrid Osterried
Life of this patent
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Abstract
In the case of a lens system, in particular a projection lens system in semiconductor lithography, with a plurality of optical elements, such as lenses, which are mounted in mounts, the mounts being connected to one another, if appropriate by means of adjusting rings, at least one inner mount of an optical element which is intended for removal and/or later fitting is connected to an outer mount by means of a three-point mounting.
Claims21
A lens system with a plurality of optical elements, which are mounted in inner mounts and outer mounts, wherein the inner mounts are connected to the outer mounts, the outer mounts being connected to one another wherein at least one inner mount of an optical element is connected to an outer mount by a three-point mounting;
- which establishes a precise and reproducible position of the inner mount.
Dependencies are inferred from the claim text.