Micro-positioning optical element

An optical system, comprising:

• an optical device for producing or receiving light rays;
• a base disposed adjacent the optical device and fixed in position relative to the optical device;
• a carrier spaced from the base, the carrier being operatively coupled to the base such that the carrier can be selectively moved in a X direction relative to the base but not substantially in a Y direction;
• and
• an optical element operatively coupled to the carrier such that the optical element can be selectively moved in the Y direction relative to the carrier but not substantially in the X direction, the optical element having optical characteristics such that at least some of the light rays that are produced or received by the optical device are transmitted therethrough.

An optical system comprising:

• an optical source or receiver for providing or receiving a light beam;
• an optical element positioned to intersect the light beam, the optical element having a first region and a second region, the first region having a first grating with a first grating spacing and a first grating width, and the second region having a second grating with a second grating spacing and a second grating width;
• and
• a driver for selectively moving the optical element in at least one direction so that the light beam selectively intersects the first region or the second region.

An optical system comprising:

• an array of optical sources or receivers;
• an array of optical elements, each optical element positioned in the path of light of a corresponding optical source or receiver, each optical element having a first region with a first filter characteristic and a second region with a second filter characteristic;
• and
• one or more drivers to move selected optical elements so that the corresponding path of light intersects the first region of the selected optical elements to provide the first filter characteristic, and for moving selected other optical elements so that the corresponding path of light intersects the second region of the selected other optical elements to provide the second filter characteristic.

A method for forming a movable optical element comprising:

• providing a starting material with a substrate, an oxide layer and a top layer;
• selectively etching the top layer to leave one or more suspended elements of the movable optical element, using the oxide layer of the starting material as an etch stop;
• and
• etching the oxide layer sufficient to release the one or more suspended elements of the movable optical element.