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US 6,445,450 B1Granted
Code reading device and method with light passing through the code twice, an exposure apparatus and a device manufacturing method using the code reading
AssigneeCanon Kabushiki Kaisha
InventorKen Matsumoto
Life of this patent
Estimating the term…
Abstract
A code reading device includes an illuminator which illuminates a code formed on a substrate with light, a reflector which reflects the light to allow the light to pass through the code at least two times, and a detector which detects the reflected light to read the code on the substrate. The substrate is one of a photomask, a reticle, a wafer and a glass plate.
Claims21
A code reading device comprising:
- an illuminator which directly illuminates a code formed on a substrate with a light beam;
- a reflector which reflects the light beam to allow the light beam to pass through the code at least two times;
- and
- a detector which detects the reflected light obtained directly from the substrate to read the code on the substrate,
- wherein the light beam reflected by the reflector passes through a substantially same pattern portion of the code as the light beam illuminated from the illuminator.
2 more elements
An exposure apparatus comprising:
- a storage unit which stores a plurality of substrates, wherein each substrate is one of a photomask, a reticle, a wafer and a glass plate;
- an exposure unit which performs exposure operations with the substrate;
- a code reading device that includes (i) an illuminator which directly illuminates with a light beam a code formed on one of the plurality of substrates, a reflector which reflects the light beam to allow the light beam to pass through the code at least two times, and a detector which detects the reflected light obtained directly from the substrate to read the code on the substrate, the light beam reflected by the reflector passing through a substantially same pattern portion of the code as the light beam illuminated from the illuminator;
- and
- a handler which handles a respective one of the substrates to move the substrate to a reading position for reading of the code by said detector.
2 more elements
A code reading device comprising:
- an illuminator which illuminates a code formed on a substrate with a light beam;
- a reflector which reflects the light beam to allow the light beam to pass through the code at least two times;
- a detector which detects the reflected light beam to read the code on the substrate;
- and
- a handler which handles the substrate with respect to the reflector,
- wherein the light beam reflected by the reflector passes through a substantially same pattern portion of the code as the light beam illuminated from the illuminator.
3 more elements
An exposure apparatus comprising:
- a storage unit which stores a plurality of substrates, wherein each substrate is one of a photomask, a reticle, a wafer and a glass plate;
- an exposure unit which performs exposure operations with the substrate;
- a code reading device that includes (i) an illuminator which illuminates with a light beam a code formed on one of the plurality of substrates, a reflector which reflects the light beam to allow the light beam to pass through the code at least two times, and a detector which detects the reflected light beam obtained directly from the substrate to read the code on the substrate;
- and
- a handler which handles a respective one of the substrates with respect to the reflector,
- wherein the light beam reflected by the reflector passes through a substantially same pattern portion of the code as the light beam illuminated from the illuminator.
3 more elements
Dependencies are inferred from the claim text.