Semiconductor element testing carrier using a membrane contactor and a semiconductor element testing method and apparatus using such a carrier

A semiconductor element testing carrier for holding a semiconductor element during testing so as to obtain an electrical contact with electrodes of the semiconductor element, said semiconductor element having a first surface on which the electrodes are formed and a second surface opposite to said first surface, said semiconductor element testing carrier comprising:

• a membrane contactor having a front surface and a back surface opposite to said front surface, said membrane contactor contacting the electrodes of said semiconductor element being placed on said front surface of said membrane contactor;
• a pressing unit pressing said membrane contactor against said semiconductor element;
• apressing and holding member holding said second surface of said semiconductor element;
• and
• a contacting part located in an area surrounding the semiconductor element to define a space having a horizontal size which is larger than a horizontal size of said semiconductor element being tested, so that said semiconductor element is held between said membrane contactor and said pressing and holding member while said membrane contactor contacts and is being pressed by said contacting part so as to maintain said membrane contactor and said pressing and holding member substantially parallel to each other, wherein
• said pressing and holding member includes a vacuum apparatus for decreasing a pressure applied on said front surface of said membrane contactor.

A method for testing a semiconductor element using a semiconductor element testing carrier for holding the semiconductor element during testing so as to obtain an electrical contact with electrodes of the semiconductor element, said semiconductor element having a first surface on which the electrodes are formed and a second surface opposite to said first surface, said semiconductor element testing carrier comprising:

• a membrane contactor having a front surface and a back surface opposite to said front surface, said membrane contactor contacting the electrodes of said semiconductor element being placed on said front surface of said membrane contactor;
• a pressing unit pressing said membrane contactor against said semiconductor element by contacting and pressing said back surface of said membrane contactor at least at an area of said back surface directly opposite to said semiconductor element;
• a pressing and holding member holding said second surface of said semiconductor element;
• and
• a contacting part located in an area surrounding the semiconductor element to define a space having a horizontal size which is larger than a horizontal size of said semiconductor element being tested, so that said semiconductor element is held between said membrane contactor and said pressing and holding member while said membrane contactor contacts and is being pressed by said contacting part so as to maintain said membrane contactor and said pressing and holding member substantially parallel to each other,
• the method for testing comprising the steps of:
• placing said semiconductor element at a predetermined position on said membrane contactor;
• holding said semiconductor element on said membrane contactor by attaching said pressing and holding member to said membrane contactor;
• pressing the back surface of said membrane contactor, at least at an area directly opposite to said semiconductor element, against said semiconductor element;
• and
• testing said semiconductor element by connecting a tester to said semiconductor element testing carrier.

A method for testing a semiconductor element using a semiconductor element testing carrier for holding the semiconductor element during testing so as to obtain an electrical contact with electrodes of the semiconductor element, said semiconductor element having a first surface on which the electrodes are formed and a second surface opposite to said first surface, said semiconductor element testing carrier comprising:

• a membrane contactor having a front surface and a back surface opposite to said front surface, said membrane contactor contacting the electrodes of said semiconductor element being placed on said front surface of said membrane contactor;
• a pressing unit pressing said membrane contactor against said semiconductor element by contacting and pressing said back surface of said membrane contactor, at least at an area directly opposite to said semiconductor element;
• a pressing and holding member holding a second surface of said semiconductor element;
• a contacting part located in an area surrounding the semiconductor element to define a space having a horizontal size which is larger than a horizontal size of said semiconductor element being tested, so that said semiconductor element is held between said membrane contactor and said pressing and holding member while said membrane contactor contacts and is being pressed by said contacting part so as to maintain said membrane contactor and said pressing and holding member substantially parallel to each other,
• the method for testing comprising the steps of:
• securing said semiconductor element to said pressing and holding member;
• attaching said pressing and holding member to said membrane contactor so that said semiconductor element is held at a predetermined position on said front surface of said membrane contactor;
• pressing the back surface of said membrane contactor, at least at an area directly opposite to said semiconductor element, against said semiconductor element;
• and
• testing said semiconductor element by connecting a tester to said semiconductor element testing carrier.

A semiconductor element testing apparatus comprising:

• a semiconductor element testing carrier for holding a semiconductor element during testing so as to obtain an electrical contact with electrodes of the semiconductor element, said semiconductor element having a first surface on which the electrodes are formed and a second surface opposite to said first surface, said semiconductor element testing carrier comprising:
• a membrane contactor having a front surface and a back surface opposite to said front surface, said membrane contactor contacting the electrodes of said semiconductor element being placed on said front surface of said membrane contactor;
• a pressing unit pressing said membrane contactor against said semiconductor element by contacting and pressing said back surface of said membrane contactor, at least at an area directly opposite to said semiconductor element;
• a pressing and holding member holding said second surface of said semiconductor element;
• a contacting part located in an area surrounding the semiconductor element to define a space having a horizontal size which is larger than a horizontal size of said semiconductor element being tested, so that said semiconductor element is held between said membrane contactor and said pressing and holding member while said membrane contactor contacts and is being pressed by said contacting part so as to maintain said membrane contactor and said pressing and holding member substantially parallel to each other,
• a base supporting said membrane contactor, said base having an opening located under said membrane contactor when said contactor is placed on said base, said opening aligning with said pressing unit located under said base;
• and
• a conveyance robot provided with said pressing and holding member so as to move said semiconductor element between the predetermined position on the front surface of said membrane contactor and a tray for storing said semiconductor element, said robot holding said pressing and holding member on said membrane contactor so as to test said semiconductor element.