Electron beam tester, recording medium therefor and signal data detecting method

A recoding medium storing an executable program in an electron beam tester comprising a drive circuit for supplying a signal to an electric component, an electron gun for causing to emanate a secondary electron from the electric component by irradiating an electron beam to a predetermined position of the electric component, and a detector for detecting an amount of the secondary electron emanated from the electric component and outputting a signal representing the amount of the secondary electron, the signal comprising a first phase including a substantially constant voltage and a second phase which follows the first phase and includes a non-constant voltage, the program comprising:

• a first program calculating a signal outputted by a detector and generating a first distributed value indicating fluctuation of a voltage of the outputted signal, said first program value indicating fluctuation of a voltage of the outputted signal, the first program computing the first distributed value at a particular data of signal in the first phase;
• a second program calculating the outputted signal and the first distributed value calculated by the first program and generating a second distributed value indicating fluctuation of a voltage of signal outputted by the detector, the second program generating a third distributed value by subtracting the first distributed value from the second distributed value, the second program calculating the second distributed value at a particular data of the outputted signal in the second phase;
• and
• a third program calculating the third distributed value and generating a voltage with a phase data corresponding to the third distributed value.

A method of detecting data on a signal at a predetermined position of an electric component when testing the electric components, the signal data detecting method comprising:

• causing to emanate a secondary electron from the electric component by irradiating an electron beam to the predetermined position of the electric component;
• measuring an amount of the secondary electron;
• calculating a signal representing the measured amount of the secondary electron, said generated signal comprising a first phase including a substantially constant voltage and a second phase which follows the first phase and includes a non-constant voltage;
• generating a first distributed value indicating fluctuation of a voltage of the calculated signal in the first phase;
• calculating out a second distributed value indicating fluctuation of a voltage of the calculated signal in the second phase;
• generating a third distributed value calculated by subtracting the first distributed value from the second distributed value;
• and
• generating a voltage with a phase data which corresponds to the third distributed value.