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US 6,445,106 B1Granted
Micro-electromechanical structure resonator, method of making, and method of using
AssigneeIntel Corporation
InventorsQing Ma, Peng Cheng
Life of this patent
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Abstract
The invention relates to a hollow microbeam that is fabricated upon a base or pedestal. Processing of the hollow microbeam includes forming at least one hollow channel in the microbeam by removing temporary fillers after formation of the microbeam. The inventive microbeam may provide at least an order of magnitude increase in oscillational frequency over a solid microbeam.
Claims8
A resonator comprising:
- a drive electrode;
- and
- a beam disposed adjacent the drive electrode, wherein the beam comprises:
- an exterior wall;
- an interior wall;
- and
- a channel between the exterior wall and the interior wall.
4 more elements
Dependencies are inferred from the claim text.